Publikationsansicht

Focused ion beams in future nanoscale probe recording (2002)

Abstract
Focused ion beam (FIB) applications in the field of nanoscale probe recording are explored. A detailed description of how to use FIBs for trimming longitudinal and perpendicular magnetic recording and playback devices to dimensions of less than 100 nm is presented. An experiment was conducted to demonstrate that the magnetoresistive property of a read element, e.g. a giant-magnetoresistive sensor, strongly depends on the focused ion current and the beam accelerating voltage.. Peer Reviewed. http://deepblue.lib.umich.edu/bitstream/2027.42/49220/2/na2210.pdf

Details der Publikation
Download , http://hdl.handle.net/2027.42/49220
http://dx.doi.org/10.1088/0957-4484/13/2/310
Herausgeber IOP Publishing Ltd
Mitarbeiter Applied Physics, University of Michigan, Ann Arbor, MI, USA, Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA, Ann Arbor
Archiv University of Michigan (United States)
Keywords Physics, Science
Sprache Englisch