| Characterization and applications of PLD oxide ceramic films (1992) | |||||||||||
Abstract | |||||||||||
| The pulse laser deposition (PLD) exhibits various consecutive processes (1,2) separated in space and time such as the energy coupling into the target material, the removal of the material from the target, the transfer of the target material as vapour and/or plasma to the substrate via the gas phase and the growth of thin films onto the substrate. The properties of the deposited films strongly depend on their growth conditions, which are highly influenced by the surface temperature and the mobility of the particles at the surface either of the substrate or of the films deposited. | |||||||||||
Details der Publikation | |||||||||||
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