Publikationsansicht

Time-resolved diagnosis of processes in PLD of ceramics (1993)

Abstract
The material transfer of ceramics (Alsub2Osub3, ZrOsub3) in pulsed laser deposition (PLD) is studied as a function of pulsed CO2 laser radiation parameters and processing variables. Timeresolved measurements of the composition and the electrontemperature as well as the geometry and dynamics of the vapour/plasma were obtained by emission spectroscopy and high-speed photography. The vapour/plasma states are related to the structures of ceramic films grown on metallic substrates.

Details der Publikation
Archiv Fraunhofer Publica (Germany)
Keywords ceramic, electron-temperature, photography, substrate, vapour deposition
Typ Journal Article
Sprache english
Verknüpfungen Applied surface science, (1993), No.69, pp.174-179 : Abb.,Lit.