Publikationsansicht

Exposure of photosensitive glasses with pulsed UV-laser radiation (2002)

Abstract
The photosensitivity in UV-range of some glasses can be used for micro structuring. The irradiated areas crystallize after a thermal treatment. Microstructures are achieved by wet-chemical etching of the crystallized areas. Interactions between UV-laser radiation of different wavelength and the photosensitive glass are investigated. The relationship between process parameters and geometry of microstructures is examined.

Details der Publikation
Archiv Fraunhofer Publica (Germany)
Typ Journal Article
Sprache english
Verknüpfungen Microsystem Technologies, Vol.8 (2002), No.2-3, pp.102-104