| Exposure of photosensitive glasses with pulsed UV-laser radiation (2002) | |||||||||
Abstract | |||||||||
| The photosensitivity in UV-range of some glasses can be used for micro structuring. The irradiated areas crystallize after a thermal treatment. Microstructures are achieved by wet-chemical etching of the crystallized areas. Interactions between UV-laser radiation of different wavelength and the photosensitive glass are investigated. The relationship between process parameters and geometry of microstructures is examined. | |||||||||
Details der Publikation | |||||||||
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