Publikationsansicht

Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing (2008)

Details der Publikation

Archiv	Fraunhofer Publica (Germany)
Typ	Conference Paper
Sprache	english
Verknüpfungen	Holmes, A.S.: Photon processing in microelectronics and photonics VII: 21 - 24 January 2008, San Jose, California, USA. Bellingham, WA: SPIE, 2008. (SPIE Proceedings Series 6879), Paper 68790N