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Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication (2008) |
- Niebelschütz, F.,
- Pezoldt, J.,
- Stauden, T.,
- Cimalla, V.,
- Tonisch, K.,
- Brueckner, K.,
- Hein, M.,
- Ambacher, O.,
- Schober, A.
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Details der Publikation |
| Archiv |
Fraunhofer Publica (Germany) |
| Typ |
Conference Paper
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| Sprache |
english
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| Verknüpfungen |
Faraone, L.: COMMAD 2008, Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings: 28 July - 1 August 2008, Sydney, Australia; In conjunction with the IUMRS-ICEM 2008 International Conference on Electronic Materials. Piscataway/NJ: IEEE, 2008, pp. 26-29
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