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Complementary metrology within a European joint laboratory (2009) |
- Nutsch, A.,
- Beckhoff, B.,
- Altmann, R.,
- Giubertoni, D.,
- Hoenicke, P.,
- Bersani, M.,
- Leibold, A.,
- Meirer, F.,
- Müller, M.,
- Pepponi, G.,
- Otto, M.,
- Petrik, P.,
- Reading, M.,
- Pfitzner, L.,
- Ryssel, H.
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Details der Publikation |
| Archiv |
Fraunhofer Publica (Germany) |
| Typ |
Conference Paper
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| Sprache |
english
|
| Verknüpfungen |
Mertens, P.: Ultra clean processing of semiconductor surfaces IX, UCPSS 2008: 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), held in Bruges, Belgium, September 22 - 24, 2008. Stafa-Zurich: Trans Tech Publications, 2009. (Solid state phenomena 145/146), pp. 97-100
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