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Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium (2009) |
- Jambreck, J.D.,
- Schmitt, H.,
- Amon, B.,
- Rommel, M.,
- Bauer, A.J.,
- Frey, L.
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Details der Publikation |
| Archiv |
Fraunhofer Publica (Germany) |
| Keywords |
full metal tip,
scanning probe microscopy,
focused ion beam,
nanoimprint lithography
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| Typ |
Poster,
Electronic Publication
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| Sprache |
english
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