Publikationsansicht

Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing: Poster at the MNE 2009, 35th International Conference on Micro and Nano Engineering, Ghent, Belgium (2009)

Jambreck, J.D.,
Schmitt, H.,
Amon, B.,
Rommel, M.,
Bauer, A.J.,
Frey, L.

Details der Publikation

Download	http://publica.fraunhofer.de/documents/N-106488.html
Archiv	Fraunhofer EPrints (Germany)
Keywords	full metal tip, scanning probe microscopy, focused ion beam, nanoimprint lithography
Typ	Poster, Electronic Publication
Sprache	english