| Friction of flat-flat micro contacts coated with amorphous carbon (2009) | |||||||||
Abstract | |||||||||
| The friction of flat-flat micro contacts was investigated using a flat punch at a Hysitron TriboIndenter®. The studied micro contacts were patterned in p-doped Si(100) using photolithography and then coated with 130 nm amorphous carbon (a-C). On the one hand the contact area was varied from 64 to 1452 µm². Therefore circular pins with different diameters from 9 to 43 µm were investigated. The flat punch was 46 µm in diameter and therewith always larger than the microstructures. On the other hand the applied normal force at scratch was varied from 10 µN to 5.8 mN. It was found that the friction force depends linear on the applied normal force. Keeping the normal force constant for all structures the friction force exhibited only a negligible dependency on the nominal contact area. Scans of the surface topography with an atomic force microscope and calculations of the contact mechanics revealed that the real contact area was very small compared to the nominal one although the coating surface is very smooth (RRMS | |||||||||
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