A frequency domain measurement diagnostic technique for plasma-tools (2004)
Law, V. J., Kenyon, A.J., Thornhill, N.F., Pagliarani, A., Lea, L., Watkins, M.
The design of a 10–500 MHz bridge is described and also its use with a tracking generator and spectrum analyser to form a scalar network analyser for the investigation of the internal...
Harmonic monitoring of the switched silicon etched process (2003)
Law, V.J., Kenyon, A.J., Thornhill, N.F., Pagliarani, A., Lee, K., Watkins, M., ...
A new non-invasive radio frequency technique for real-time monitoring of the STS ASE (TM) deep silicon etch process, or other forms of the Bosch switched etch process, is reported. The technique...
Harmonic monitoring of the switched silicon etched process (2003)
Law, V.J., Kenyon, A.J., Thornhill, N.F., Pagliarani, A., Lee, K., Watkins, M., ...
A new non-invasive radio frequency technique for real-time monitoring of the STS ASETM deep silicon etch process, or other forms of the Bosch switched etch process, is reported. The technique...