Complementary metrology within a European joint laboratory (2009)
Nutsch, A., Beckhoff, B., Altmann, R., Giubertoni, D., Hoenicke, P., ...
Pollakowski, B., Beckhoff, B., Reinhardt, F., Braun, S., Gawlitza, P.
Nondestructive methods based on electron emission may encounter serious difficulties when probing the chemical state of deeply buried nanolayers due to restricted information depth. The purpose of...