C. Ebm

Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2009)

Rommel, M., Jambreck, J., Ebm, C., Platzgummer, E., Bauer, A., Frey, L.

Todays focused ion beam (FIB) systems enable the fast and flexible fabrication of 3D structures with dimenFocused ion beam; FIB; FIB patterning; patterning simulation; patterning strategysions well...

Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2009)

Rommel, M., Jambreck, J., Ebm, C., Platzgummer, E., Bauer, A., Frey, L.

Todays focused ion beam (FIB) systems enable the fast and flexible fabrication of 3D structures with dimenFocused ion beam; FIB; FIB patterning; patterning simulation; patterning strategysions well...