Wesner, D.A., Aden, M., Gottmann, J., Husmann, A., Kreutz, E.W.
Holes in polypropylene (PP) and polymethylmethacrylate (PMMA) plates, 0.5 mm in thickness were drilled by irradiation with up to 3000 pulses of KrF-excimer laser radiation at fluences per pulse in...
Model of laser-induced Material Removal of Polymers and Gasdynamics (1998)
Aden, M., Wesner, D.A., Kreutz, E.W., Poprawe, R.
A model is build up to describe the effects of the laser-induced material removal of polymers and the dynamics of the volatile species. The heating and removal are described by the volume- heating of...
Klotzbücher, T., Gottmann, J., Meyer, M., Wesner, D.A., Kreutz, E.W.
Pulsed laser deposition (PLD) with KrF-excimer laser radiation (lambda = 248 nm, tau = 25 ns) is used to grow thin films Of diamond-like carbon (DLC) on Si substrates by material removal from a...
Deposition of carbon nitride thin films in a hybrid r.f.-PLD technique (1998)
Klotzbücher, T., Scherge, M., Mergens, M., Wesner, D.A., Kreutz, E.W.
In a hybrid r.f.-PLD technique pulsed laser deposition (PLD) in combination with a capacitively coupled r.f. substrate bias with nitrogen as processing gas was used to synthesize CN(x) films with...
Pulsed laser deposition of crystalline PZT thin films (1997)
Husmann, A., Wesner, D.A., Schmidt, J., Klotzbücher, T., Mergens, M., Kreutz, E.W.
Sintered targets of PbZ(0.52)Ti(0.48)O3, are used in a pulsed laser deposition (PLD) process to deposit thin ferroelectric films onto a Pt/Ti/Si(111) substrate for electrical applications. Repetition...
KrF-excimer laser pretreatment and metallization of polymers (1997)
Weichenhain, R., Wesner, D.A., Pfleging, W., Horn, H., Kreutz, E.W.
Metal film adhesion to polymers can be improved by pretreatment with UV-laser radiation before metal deposition. Chemical changes associated with irradiation are investigated for polyimide (PI) and...
Excimer-laser patterning of copper in LDE (laser dry etching) (1997)
Pfleging, W., Vörckel, A., Duddek, H., Wesner, D.A., Kreutz, E.W.
Patterning of Cu bulk material and Cu foils (1 mu m in thickness) with etch rates up to 20 A.U./pulse is performed in an LDE (laser dry etching) process with excimer laser radiation (lambda = 248 nm)...
Time-resolved spectroscopy of laser induced plasma from BaTiO3 (1996)
Mertin, M., Offenberg, D., Wesner, D.A., Kreutz, E.W.
The time-resolved luminescence spectra of laser induced plasma from BaTiO3 were studied with a optical rnultichannel analyzer (OMA III). The time of-flight spectra of' various particles, by which the...
Cleaning of copper traces on circuit boards with excimer laser radiation (1996)
Wesner, D.A., Mertin, M., Lupp, F., Kreutz, E.W.
Cleaning of Cu traces on circuit boards is studied using pulsed excimer laser radiation (pulse width ca. 20 ns, wavelength 248 run), with the goal of improving the properties of the Cu surface for...
CCl4-assisted CF4 etching of silicon in a microwave-assisted LDE(laser dry etching)-process (1996)
Pfleging, W., Wesner, D.A., Kreutz, E.W.
A combination of microwave excitation and a mask projection scheme is applied for laser-assisted laterally structured etching of silicon. Different feed gases are used, such as CF4, either...
Tailoring of surface properties by removal and deposition with laser radiation (1995)
Kreutz, E.W., Frerichs, H., Mertin, M., Wesner, D.A., Pfleging, W.
The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal...
Surface analysis of films and film systems produced by pulsed laser deposition (1995)
Wesner, D.A., Pfleging, W., Klotzbücher, T., Kreutz, E.W.
Ceramic films and film systems (ZrO2 films, ZrO2/Ti multilayers, and BN films) are deposited by pulsed laser deposition (PLD) and analyzed using X-ray photoelectron (XPS), Auger electron (AES), and...
Structure and chemical composition of BN thin films grown by pulsed-laser deposition -PLD- (1995)
Klotzbücher, T., Pfleging, W., Mertin, M., Wesner, D.A., Kreutz, E.W.
BN thin films are grown on Si(100) substrates in a pulsed-laser-deposition (PLD) process using a pulsed CO2 laser, a hexagonal-phase BN (h-BN) target, and N2 as processing gas. The effect of RF power...
Processing of polymer surfaces by laser radiation (1995)
Kreutz, E.W., Frerichs, H., Stricker, J., Wesner, D.A.
The processing of polymer surfaces by laser radiation is investigated as a function of laser parameters (fluence, mode of operation) and processing variables (repetition rate, pulse number). Polymers...
Laser radiation. A tool for generation of defined thin film properties for application (1995)
Kreutz, E.W., Alunovic, M., Klotzbücher, T., Mertin, M., Wesner, D.A., Pfleging, W.
Pulsed laser deposition as a method of physical vapour deposition suitable for the deposition of thin films with complex structures and compositions is briefly reviewed. Excimer, Nd:YAG and CO2 laser...
Laser-induced surface modification and metallization of polymers (1995)
Frerichs, H., Stricker, J., Wesner, D.A., Kreutz, E.W.
Laser-induced surface modification of different polymers is presented as a suitable pretreatment of surfaces in a two-step metallization process. Materials such as polyamide (PA), polypropylene (PP),...
Electron and laser radiation as sources of zirconia film deposition (1995)
Kreutz, E.W., Lemmer, O., Wesner, D.A., Alunovic, M., Erkens, G., Leyendecker, F., ...
The deposition of zirconia films by electron and laser radiation on steel substrates was investigated as a function of beam parameters and processing variables. The type, the number and the angular...
Degradation of optical components in laser machines for manufacturing (1995)
Kreutz, E.W., Dahmen, M., Haas, C.R., Wesner, D.A.
Coated ZnSe optical components are irradiated with high-power pulsed CO2 laser radiation (lambda=10.6 micrometer, pulse length about 100 ns) at fluences up to 250 J/sqcm. The components are...
Investigation of optical components under irradiation with high-power, cw CO2 lasers (1994)
Angenent, A., Haas, C.R., Koch, J., Kreutz, E.W., Wesner, D.A.
Optical components used in high-power, cw-lasers must withstand power densities of up to several tens of kW/cm (exp 2) over long periods of time without appreciable changes in their properties...
Pulsed laser deposition and patterning of electroceramic thin films (1994)
Mertin, M., Offenberg, D., An, C.W., Wesner, D.A., Kreutz, E.W.
Kreutz, E.W., Alunovic, M., Voss, A., Pfleging, W., Sung, H., Wesner, D.A.
Single-component films of cerammic materials (Al2O3, ZrO2, BN) as well as multi-component films and controllably inhomogeneous films (ZrO2, Ti) were investigated. The deposition was performed using...
Damage to coated ZnSe optical components by high-power CO2 laser radiation (1994)
Haas, C.R., Kreutz, E.W., Wesner, D.A.
Coated ZnSe optical components are irradiated with high-power, pulsed CO2 laser radiation (Lambda = 10.6 mym, pulse length about 100 ns) at fluences up to 210 J/qcm. The components are characterized...
Damage to cooper mirrors by high-power CO2 laser radiation (1993)
Angenent, A., Haas, C.R., Koch, J., Kreutz, E.W., Wesner, D.A.
A focussed, cw CO2 laser is used to irradiate polished Cu mirrors at power densities near 40 kW/qcm. Uncoated mirrors and mirrors having a reflection-enhancing Au coating with a protective Y2O3 layer...