Rommel, M., Jambreck, J., Ebm, C., Platzgummer, E., Bauer, A., Frey, L.
Todays focused ion beam (FIB) systems enable the fast and flexible fabrication of 3D structures with dimenFocused ion beam; FIB; FIB patterning; patterning simulation; patterning strategysions well...
Rommel, M., Jambreck, J., Ebm, C., Platzgummer, E., Bauer, A., Frey, L.
Todays focused ion beam (FIB) systems enable the fast and flexible fabrication of 3D structures with dimenFocused ion beam; FIB; FIB patterning; patterning simulation; patterning strategysions well...
Projection maskless lithography (PML2): Proof-of-concept setup and first experimental results (2008)
Klein, C., Platzgummer, E., Loeschner, H., Gross, G., Dolezel, P., Tmej, M., ...
Projection Mask-Less Lithography (PML2) is a potentially cost-effective multi electron-beam solution for the 32nm-node and beyond. PML2 is targeted on using hundreds of thousands of individually...
MAGIC: A european program to push the insertion of maskless lithography (2008)
Pain, L., Icard, B., Tedesco, S., Kampherbeck, B., Gross, G., Klein, C., ...
Accurate parameter extraction for the simulation of direct structuring by ion beams (2007)
Beuer, S., Rommel, M., Lehrer, C., Platzgummer, E., Kvasnica, S., Bauer, A.J., ...
In this work, methods for an accurate extraction of parameters for the simulation of nanoscaled structuring by focused ion beams will be discussed. For this purpose the quantitative understanding of...
Simulation of ion beam direct structuring for 3D nanoimprint template fabrication (2006)
Platzgummer, E., Biedermann, A., Langfischer, H., Eder-Kapl, S., Kuemmel, M., Cernusca, S., ...
Nanopatterning of magnetic disks by single-step ar+ ion projection (2003)
Dietzel, A., Berger, R., Loeschner, H., Platzgummer, E., Stengl, G., Bruenger, W.H., ...
Large-area Ar+ projection has been used to generate planar magnetic nanostructures on a 1"-format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer...
Resistless patterning of magnetic storage media using ion projection structuring (2002)
Dietzel, A., Berger, R., Grimm, H., Schug, C., Brünger, W.H., Dzionk, C., ...
Ion projection direct structuring for patterning of magnetic media (2002)
Dietzel, A., Berger, R., Grimm, H., Brünger, W.H., Dzionk, C., Letzkus, F., ...
Ion projection facilitates a direct structuring, which Is an attractive potential manufacturing process for patterned storage media. An advantage to this method is that the media roughness remaines...