Kilper, T., Beyer, W., Bräuer, G., Bronger, T., Carius, R., ...
The influence of oxygen and nitrogen impurities on the performance of thin-film solar cells based on microcrystalline silicon (mu c-Si:H) has been systematically investigated. Single mu c-Si:H layers...
MOCVD and MOD of YBCO and buffer layers on textured metal tapes. (2009)
Stadel, O., Muydinov, R., Bräuer, G., Rikel, M.O., Ehrenberg, J., Bock, J., ...
IEEE Transactions on Applied Superconductivity, 19(2009) S.3160-63
Friction of flat-flat micro contacts coated with amorphous carbon (2009)
Paulkowski, D., Bandorf, R., Schiffmann, K., Bräuer, G.
The friction of flat-flat micro contacts was investigated using a flat punch at a Hysitron TriboIndenter®. The studied micro contacts were patterned in p-doped Si(100) using photolithography and...
Studies on diamond-like carbon coatings for the application in micro actuators (2008)
Paulkowski, D., Bandorf, R., Achilles, S., Pape, F., Gatzen, H.H., Bräuer, G.
Minimizing wear and friction in the contact area of the sliding parts of Micro-Electro- Mechanical System (MEMS) components is of utmost importance for the functionally and reliability. Diamond-like...
Hard and soft magnetic materials for electromagnetic microactuators (2008)
Bedenbecker, M., Bandorf, R., Bräuer, G., Lüthje, H., Gatzen, H.H.
An important aspect of the development of electromagnetic microactuators is the search for suitable materials as well as the development of the respective deposition and patterning processes. Within...
Hard and soft magnetic materials for electromagnetic microactuators (2008)
Bedenbecker, M., Bandorf, R., Bräuer, G., Lüthje, H., Gatzen, H.H.
An important aspect of the development of electromagnetic microactuators is the search for suitable materials as well as the development of the respective deposition and patterning processes. Within...
Bräuer, G., Möhwald, K., Deißler, T.A., Paschke, H., ...
Forging dies are exposed to high mechanical, thermal and tribological stresses. The resulting wear is a special issue for precision forging dies because they have to comply with very narrow...
Gerdes, H., Schmidt, M., Wellhausen, J., Bandorf, R., Bräuer, G.
In many technical applications additional information about the resulting loading or actually applied forces are gained by the use of strain gauges. Besides polymer based strain gauges which are...
Smart coatings for intelligent surfaces (2008)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Magnetronzerstäubung - Meilensteine aus 20 Jahren (2008)
Magnetron sputtering nowadays is the most important technology for the deposition of high-quality thin films. Since its introduction in the late seventies magnetron sputtering has conquered all...
Tribologie amorpher Kohlenstoffschichten auf mikrostrukturierten Oberflächen (2007)
Phataralaoha, A., Paulkowski, D., Bandorf, R., Küster, R., Büttgenbach, S., Bräuer, G.
Diamantähnliche Kohlenstoffschichten (a-C, a-C:H) sind als reibmindernd und verschleißarm bekannt. Die tribologischen Eigenschaften der Schichten können duch Variation der Substrat-Biasspannung...
Pape, F., Yildiz-Ünveren, R., Küster, R., Bandorf, R., Bräuer, G., Gatzen, H.H.
The properties of interfaces of functional parts used in micro actuators are very important to guarantee a high reliability for the whole life cycle of the device. In this paper, surface...
Hart- und weichmagnetische Materialien für elektromagnetische Mikroaktoren (2007)
Bedenbecker, M., Bandorf, R., Bräuer, G., Lüthje, H., Gatzen, H.H.
Ein wichtiger Aspekt der Entwicklung elektromagnetischer Mikroaktoren ist die Erforschung geeigneter Materialien sowie die Entwicklung der entsprechenden Abscheide- und Strukturierungsprozesse. Im...
Plasma for surface technology - examples of current developments (2007)
Bräuer, G., Diehl, W., Frach, P., Kirchhoff, V., Sittinger, V., Szyszka, B., ...
High volume plasma discharges nowadays are the key for economic deposition of thin films on plane (e.g. glass sheets) or shaped substrates. During the past 30 years plasma based physical and chemical...
Plasma for surface technology - examples of current developments (2007)
Bräuer, G., Diehl, W., Frach, P., Kirchhoff, V., Sittinger, B., Szyszka, B., ...
High volume plasma discharges nowadays are the key for economic deposition of thin films on plane (e.g. glass sheets) or shaped substrates. During the past 30 years plasma based physical and chemical...
Kilper, T., Carius, R., Rech, B., Bräuer, G., Repmann, T.
Silicon thin-film solar cells based on microcrystalline silicon (µc-Si:H) were prepared in a 30x30 cm3 PECVD reactor at 13.56 and 40.68 MHz plasma excitation frequency. Plasma emission was recorded...
Tribology of microsystems (2006)
Küster, R., Bandorf, R., Henke, C., Lüthje, H., Neumeister, C., ...
In this work the possibilities for the reduction of friction and wear in micro electro-mechanical systems (MEMS) are investigated. An improvement of the tribological behaviour of microsystems can be...
INPLAS - Das Kompetenznetz Industrielle Plasma-Oberflächentechnik (2006)
Bräuer, G., Brand, C., Baar, A., Bub, O.
Germany takes up a worldwide top position in the field of plasma technology and its applications. This was pointed out in a study commissioned by the German BMBF in 2003. To protect and expand this...
Intelligente Schichten für "denkende Oberflächen" (2006)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Richter, F., Bräuer, G., Möller, W.
Die vorgestellten Arbeiten und Ergebnisse sind Teil eines Forschungsverbundes zur Analyse und Modellierung der Einwirkung gepulster Plasmen auf Oberflächen. Sie haben das Ziel zum physikalischen...
Tribologie von MEMS-Komponenten (2005)
Bandorf, R., Küster, R., Henke, C., Lüthje, H., Neumeister, C., ...
Da sich Lubrikatschmierung für Mikrobauteile auf Grund der dadurch auftretenden extrem hohen Adhäsionskräfte schwer realisieren lässt, liegt ein starkes Interesse bei der tribologischen...
Entwicklung und Fertigung magnetischer Schichten (2005)
Bedenbecker, M., Bandorf, R., Lüthje, H., Bräuer, G.
Da die erreichbaren Kräfte bei linearen elektromagnetischen Mikromotoren einerseits vom erreichbaren magnetischen Fluss abhängen, andererseits möglichst geringe Dimensionen der Flussführung...
Verschleißarme Beschichtungen für Mikroaktoren (2005)
Küster, R., Bandorf, R., Lüthje, H., Bräuer, G.
Wesentliche Verbesserungen für das Verschleißverhalten von Mikrokomponenten können mit Hilfe ultradünner Beschichtungen erreicht werden. Für den Einsatz in tribologisch belasteten Mikrobauteilen...
On the reliability of recent tests of the Out of Africa hypothesis for modern human origins (2004)
Bräuer, G., Collard, M., Stringer, C.
In this paper we critique two recent studies that have been claimed to disprove the Out of Africa hypothesis for modern human origins (Hawks et al., 2000; Wolpoff et al., 2001). We show that the test...
CBN coatings on cutting tools (2004)
Uhlmann, E., Bräuer, G., Wiemann, E., Keunecke, M.
Hard cutting materials are a prerequisite for the machining of hard workpiece materials. Superhard cubic boron nittride (cBN) is the hardest known material eligible for the machining of ferrous...
Submicron coatings for micro-tribological applications (2004)
Bandorf, R., Lüthje, H., Schiffmann, K., Beck, M., Schmidt, M., ...
The miniaturisation of mechanical components and machines enables innovative future products. However, for the improvement of functionality, reliability and lifetime of those micro systems, micro...
Budde, T., Föhse, M., Majjer, B., Lüthje, H., Bräuer, G.
Soft magnetic yokes, cores, and poles, as well as permanent magnets are the potential magnetic components of an electromagnetic microactuator system. Depending on the requirements of the actuator,...
Plasma surface technologies in Germany (2003)
Plasma surface engineering has become a key technology in Germany during the past two decades. The history of surface coating dates back to 1817 when Fraunhofer deposited antireflective films on...
Fertigung magnetischer Schichten (2003)
Budde, T., Föhse, M., Majjer, B., Lüthje, H., Bräuer, G.
Im Bereich der Herstellung weichmagnetischer Schichten wurden NiFe-Legierungen unterschiedlicher Zusammensetzung untersucht, die mittels verschiedener Verfahren hergestellt wurden. Als Verfahren...
Magnetron sputtering is the preferred production process for various coatings on large glass panes and plastic foils. During the past two decades glass and web coating has spread into a wide field of...
Submikrometerschichten für mikrotribologische Anwendungen (2003)
Bandorf, R., Lüthje, H., Schiffmann, K., Beck, M., Schmidt, M., ...
Die Herstellung der diskutierten mikrotribologischen Schichtsysteme erfolgte mit Hilfe etablierter Verfahren der chemischen und physikalischen Gasphasenabscheidung (CVD, PVD), beziehungsweise einer...
Uniformity in large area ZnO:Al films prepared by reactive midfrequency magnetron sputtering (2002)
Hong, R.J., Jiang, X., Sittinger, V., Szyszka, B., Höing, T., Bräuer, G., ...
Al-doped zinc oxide (ZnO:Al) films were deposited on glass substrates using a reactive midfrequency magnetron sputtering process. The optical transmission and reflection as well as the electrical...
Friction and wear reducing coatings for tools and components (2001)
Bewilogua, K., Bräuer, G., Gäbler, J., Hieke, A., Keunecke, M., Schäfer, L., ...
Szyszka, B., Höing, T., Jiang, X., Bierhals, A., Malkomes, N., Vergöhl, M., ...
This study is on the up scaling of the reactive mid frequency (MF) magnetron sputter deposition of zinc oxide:aluminum (ZnO:Al) layers developed by our institute. Aluminumdoped zinc oxide films have...
Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells (2001)
Müller, J., Schöpe, G., Kluth, O., Bech, R., Ruske, M., Trube, J., ...
Large area glass/ZnO-films were prepared by high-rate dc magnetron sputtering from ceramic targets and compared to lab-type rf- and mf-sputtered ZnO. The initially smooth films exhibit excellent...
Vergöhl, M., Malkomes, N., Matthee, T., Bräuer, G., Richter, U., ...
For the deposition of optical coatings on architectural glass, spectroscopic ellipsometry and spectral photometry have been applied. For the purpose of achieving a high competitiveness of...
TCO-coating of polymer substrates using reactive MF-magnetron sputtering of ZnO:Al layers (2000)
Szyszka, B., Jiang, X., Höing, T., Pöckelmann, R., Bringmann, U., Bräuer, G.
Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells (2000)
Müller, J., Schöpe, G., Kluth, O., Bech, R., Ruske, M., Trube, J., ...
Large area glass/ZnO-films were prepared by high-rate dc magnetron sputtering from ceramic targets and compared to lab-type rf- and mf-sputtered ZnO. The initially smooth films exhibit excellent...
Treichel, O., Kirchhoff, V., Bräuer, G.
Since the 1980's the so called low-E (low emissivity or IR-reflecting) multilayer systems have gained in significance as regards the economical and ecological aspects of reducing the heat loss...
Vergöhl, M., Malkomes, N., Matthee, T., Bräuer, G., Richter, U., ...
For the deposition of optical coatings on architectural glass, spectroscopic ellipsometry and spectral photometry have been applied. For the purpose of achieving a high competitiveness of...
Optimization of the reflectivity of magnetron sputter deposited silver films (2000)
Vergöhl, M., Malkomes, N., Szyszka, B., Neumann, F., Matthee, T., Bräuer, G.
Silver films were deposited using direct current (dc) and midfrequency (MF) magnetron sputter deposition processes on floatglass in order to achieve maximum reflectivity over the entire visual and...
Ein neues Wärmedämmsystem für Architekturglas (2000)
Vacuum coated glass plays an outstanding role for the energy saving of buildings. The basis of such low emissivity coatings is a 10 nm thick silver layer causing an effective reflexion of room...
Vergöhl, M., Malkomes, N., Matthée, T., Bräuer, G.
In situ spectroscopic ellipsometry was applied for real-time control of the reactive magnetron sputter process of optical coatings on glass. Single transparent films of SiO2, Si3N4 and SiOxNy with...
Vergöhl, M., Malkomes, N., Matthée, T., Bräuer, G.
Different plasma control systems are applied for the stabilization of the reactive magnetron sputter process within the transition mode with power densities of up to 6 W/cm². Ex-situ spectroscopic...
Vergöhl, M., Malkomes, N., Bräuer, G., Bruch, J., Jäger, S., Richter, U.
Das in den 90er Jahren entwickelte Verfahren des Mittelfrequenz-Sputterns (z. B. TwinMag von Leybold) weist eine Reihe von Vorteilen gegenüber der konventionellen DC-Technik auf. Neben der...
Jäger, S., Szyszka, B., Szczyrbowski, J., Bräuer, G.
Antomony-doped tin oxide and aluminium-doped zinc oxide films have been prepared by reactive a.c. and d.c. magnetron sputtering (a.c. excitation at frequency of 40 kHz; twin-cathode arrangement) from...
Jäger, S., Szyszka, B., Szczyrbowski, J., Bräuer, G.
Antimony-doped tin oxide and aluminum-doped zinc oxide films have been prepared by reactive AC and DC magnetron sputtering (AC excitation at frequency of 40 kHz; twin- cathode arrangement) from...