Cryogenic design of the ALUHEAT project (2008)
Hiltunen, I., Stenvall, A., Korpela, A., Lehtonen, J., Mikkonen, R., Runde, M., ...
ALUHEAT project aims to build a cryogen-free superconducting induction heater. In this paper, the cryogenic design, which includes heat loss calculations, mechanical analysis, optimization of current...
Elektrostatisches Halteelement (2007)
EP 1378936 A UPAB: 20040205 NOVELTY - Electrostatic holding element has a dielectric part with a thickness of less than 0.5 mm and having a structured surface. The holding element is made from a...
Flatness characterization of EUV mask chucks (2007)
Kalkowski, G., Risse, S., Müller, S.
For future extreme ultra violet (ELTV) lithography at a wavelength of about 13 nm, flatness of the mask surface is an issue, since out-of-plane deviations sensitively transfer to in-plane...
Verfahren zum Laser-gestuetzten Bonden, derart gebondete Substrate und deren Verwendung (2007)
Tünnermann, A., Eberhardt, R., Kalkowski, G., Nolte, S.
DE 102007008540 A1 UPAB: 20080906 NOVELTY - Method for laser-supported bonding of substrates comprises connecting two substrates by indirect contact and strengthening the connection between the...
Krauss, M., Leopoldsberger, G., Kalkowski, G., Eberhardt, R., Tünnermann, A., Jahnke, C., ...
DE 102007060784 A1 UPAB: 20090702 NOVELTY - Joining of two or more components that are made of glass, ceramic and/or glass ceramic by using a water glass-joining solution having sodium-, potassium-...
Halte-und Fixiereinrichtung fuer optische Elemente (2005)
Damm, C., Peschel, T., Kalkowski, G., Leitel, A.
EP 1302800 A UPAB: 20030813 NOVELTY - A holding- and fixing-device for at least two optical elements (7), which are arranged with uniformly shaped elements (1,2) at three radial outer edge zones with...
BELICHTUNGSANLAGE MIT HALTEEINRICHTUNG FUER EIN SUBSTRAT (2005)
Schubert, G., Kirschstein, U., Risse, S., Harnisch, G., Kalkowski, G., Guyenot, V.
WO 200031774 A UPAB: 20000811 NOVELTY - Holder has table (1) movable in a co-ordinate system on which substrate (18) is placed with substrate distance setting and alignment devices. Optical exposure...
Verfahren zur Ausrichtung eines optischen Elementes in Bezug zur Rotationsachse einer Welle (2005)
Kalkowski, G., Risse, S., Harnisch, G., Gebhardt, A.
DE 10008228 A UPAB: 20020321 NOVELTY - The optical element (6) has two radially outer reflecting planar faces and is drilled out for the shaft (3) whose platform (4) mounts three adjusters (5) in...
Projektionsvorrichtung mit Feedbackfunktion (2004)
Muehlhoff, D., Troellsch, A., Waldhaeusl, R., Schreiber, P., Kalkowski, G.
DE 10312624 A UPAB: 20041112 NOVELTY - The detector (3, 4) senses an optical mark (7) produced by a marker unit (6) in the projected (1) image (2), communicating its position with the projector (1)....
Halterung fuer optische Elemente sowie Verfahren zur Herstellung (2004)
Kalkowski, G., Damm, C., Peschel, T., Kunze, N., Mueller, S.
DE 10316926 B UPAB: 20041015 NOVELTY - A holder for an optical element (10,11,12) consists of three identical segments (1). Each individual segment has a curved or chamfered carrier (2) made of a...
Kalkowski, G., Damm, C., Beckert, E., Leitel, A.
DE 10228053 A UPAB: 20040213 NOVELTY - The focusing system for the optical components (1, 2) of a projector comprises adjusters (3) which cooperate with sloping surfaces (14) attached to the...
Optisches Element und Verfahren zu seiner Herstellung (2004)
Kalkowski, G., Damm, C., Beckert, E., Leitel, A.
DE 10228054 A UPAB: 20040226 NOVELTY - Two part-elements (1,2) are positioned in relation to a shared adjusting axis and a re connected by at least three connecting elements (16) located on three...
Elektrostatisches Fixierelement und Verfahren zu seiner Herstellung (2004)
Kalkowski, G., Banse, H., Eberhardt, R., Stoeckl, W.
DE 10330901 A UPAB: 20040331 NOVELTY - Electrostatic fixing element comprises a dielectric upper part (1) and a body (4) connected to each other in an interlocking manner. An electrically conducting...
Segmented lens mount for projection optics (2003)
Kalkowski, G., Damm, C., Peschell, T., Leitel, A., Kunze, N.
Since mechanical accuracy is of major importance in the field of optics, piece production is still prevailing and implementations of techniques of mass producti on are a challenge. Using injection...
VORRICHTUNG UND VERFAHREN ZUM EINFUEHREN VON BIEGEELASTISCHEN FASERN IN LOECHER (2003)
Olbricht, K., Schuster, M., Kalkowski, G., Harnisch, G., Eberhardt, R., Mohaupt, M.
WO 200252326 A UPAB: 20020903 NOVELTY - The fiber is held by the first gripper and movably guided, and is held by at lest one other gripper at a distance apart from the first gripper, to compensate...
Electrostatic chuck behaviour at ambient conditions (2002)
Kalkowski, G., Risse, S., Guyenot, V.
For advanced lithography applications, high-precision electrostatic chucks with diameters up to 12 inch are being developed at IOF. Although electrostatic chucking is mostly used in vacuum, the...
Electrostatic chucks for lithography applications (2001)
Kalkowski, G., Risse, S., Harnisch, G., Guyenot, V.
High precision electrostatic chucks with diameters up to 12 inches are being developed at IOF for electron/ion-beam lithography applications. For optimal performance, selection of the appropriate...
Verfahren und Vorrichtung zum Messen von Unwuchten an rotierenden Koerpern (2001)
Kalkowski, G., Risse, S., Guyenot, V.
EP 969274 A UPAB: 20000209 NOVELTY - The machine includes a sensor assigning phase to rotor (1) angular position and two or more, separated laser vibrometers. Each measures radial, vibratory, rotor-...
Doppelsphärische Luftlager aus Glas bzw. Glaskeramik (1998)
Risse, S., Kalkowski, G., Harnisch, G., Gebhardt, A.
With attention to the increasing demands on precision engineering and microsystem technologies it is necessary to optimize bearings through a wise choice of technologies and materials for highly...
Balancing of a high speed rotor in aerodynamic bearings (1998)
Kalkowski, G., Risse, S., Fürle, T., Guyenot, V.
For applications in laser display technology, a polygonal line scanning device based on aerodynamic hemispherical bearings is being developed in our laboratory. The rotor of the device requires...
X-RAY ABSORPTION ON URANIUM SYSTEMS AT VARIOUS THRESHOLDS (1986)
Kalkowski, G., Kaindl, G., Brewer, W., Krone, W.
We have studied the near edge X-ray absorption fine structure of various metallic and non-metallic U compounds at the L3, M3, M4,5, N4,5, and O4,5 thresholds using transmission and...
X-RAY ABSORPTION ON URANIUM SYSTEMS AT VARIOUS THRESHOLDS (1986)
Kalkowski, G., Kaindl, G., Brewer, W., Krone, W.
We have studied the near edge X-ray absorption fine structure of various metallic and non-metallic U compounds at the L3, M3, M4,5, N4,5, and O4,5 thresholds using transmission and...
X-RAY ABSORPTION ON URANIUM SYSTEMS AT VARIOUS THRESHOLDS (1986)
Kalkowski, G., Kaindl, G., Brewer, W., Krone, W.
We have studied the near edge X-ray absorption fine structure of various metallic and non-metallic U compounds at the L3, M3, M4,5, N4,5, and O4,5 thresholds using transmission and...
Valence Changes at the Surface of Some Intermetallic Eu Compounds (1984)
Schneider, W. D., Laubschat, C., Kalkowski, G., Haase, J., Puschmann, A.
Surface Effects in Eu Intermetallics - a Resonant Photoemission-Study (1983)
Schneider, W. D., Laubschat, C., Kalkowski, G., Haase, J., Puschmann, A.
Tm-169 MÖSSBAUER STUDY OF THULIUM HYDRIDES (II) : TmH3 (1980)
Wortmann, G., Kalkowski, G., Heidemann, A., Wagner, F.
No abstract available
Tm-169 MÖSSBAUER STUDY OF THULIUM HYDRIDES (II) : TmH3 (1980)
Wortmann, G., Kalkowski, G., Heidemann, A., Wagner, F.
No abstract available
Tm-169 MÖSSBAUER STUDY OF THULIUM HYDRIDES (II) : TmH3 (1980)
Wortmann, G., Kalkowski, G., Heidemann, A., Wagner, F.
No abstract available
Moessbauer studies of TmH§3 and DyH§3. (1980)
Stewart, G.A., Kalkowski, G., Wortmann, G.
Journal of the Less-Common Metals, 73(1980) S.291-300