J. Matsuo

High sputtering yields of organic compounds by large gas cluster ions (2008)

Ichiki, K, Ninomiya, S, Nakata, Y, Honda, Y, Seki, T, Aoki, T, ...

Low damage smoothing of magnetic materials using off-nonnal gas cluster ion beam irradiation (2007)

Kakuta, S., Sasaki, S., Furusawa, K., Seki, T., Aoki, T., Matsuo, J.

Energy distribution of high-energy cluster ion beams (2007)

Seki, T., Matsuo, J.

Effect of oblique irradiation of gas cluster ion beam on surface properties of gold mirrors (2007)

Suzuki, A., Bourelle, E., Sato, A., Seki, T., Matsuo, J.

Low-damage surface smoothing of laser crystallized polycrystalline silicon using gas cluster ion beam (2007)

Tokioka, H., Yamarin, H., Fujino, T., Inoue, M., Seki, T., Matsuo, J.

High-speed processing with high-energy SF6 cluster ion beam (2007)

Seki, T., Matsuo, J.

Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere (2007)

Ichiki, K., Ninomiya, S., Seki, T., Aoki, T., Matsuo, J.

Low damage smoothing of magnetic material films using a gas cluster ion beam (2007)

Kakuta, S., Sasaki, S., Hirano, T., Ueda, K., Seki, T., Ninomiya, S., ...

Ion-Induced Emission of Amino Acid Molecular Ions from Thin Films (2007)

Nakata, Y, Honda, Y, Ninomiya, S, Matsuo, J

Molecular dynamics simulations of surface modification and damage formation by gas cluster ion impacts (2006)

Aoki, T, Matsuo, J

ITO surface smoothing with argon cluster ion beam (2006)

Heck, C, Seki, T, Oosawa, T, Chikamatsu, M, Tanigaki, N, Hiraga, T, ...

Cluster size dependence of sputtering yield by cluster ion beam irradiation (2006)

Seki, T, Murase, T, Matsuo, J

Molecular dynamics simulations of surface modification and damage formation by gas cluster ion impacts (2006)

Aoki, T, Matsuo, J

Molecular dynamics study of particle emission by reactive cluster ion impact (2006)

Aoki, T, Matsuo, J

High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions (2006)

Ninomiya, S, Aoki, T, Seki, T, Matsuo, J

Secondary ion measurements for oxygen cluster ion SIMS (2006)

Ninomiya, S, Aoki, T, Seki, T, Matsuo, J

Molecular dynamics study of the angular dependence of reactive cluster impacts (2005)

Aoki, T, Matsuo, J

Molecular dynamics simulations of sequential cluster ion impacts (2005)

Aoki, T, Matsuo, J

Molecular dynamics study of the angular dependence of reactive cluster impacts (2005)

Aoki, T, Matsuo, J

Energy distributions of high current cluster ion beams (2005)

Seki, T, Matsuo, J

Sidewall polishing with a gas cluster ion beam for photonic device applications (2005)

Bourelle, E, Suzuki, A, Sato, A, Seki, T, Matsuo, J

Defect characteristics by boron cluster ion implantation (2003)

Aoki, T, Matsuo, J, Takaoka, G, Toyoda, N, Yamada, I

Cluster species and cluster size dependence of damage formation by cluster ion impact (2003)

Aoki, T, Matsuo, J, Takaoka, G, Yamada, I

Molecular dynamics study of damage formation characteristics by large cluster ion impacts (2003)

Aoki, T, Matsuo, J, Takaoka, G

Molecular effect on projected range in ultralow-energy ion implantation (2003)

Kimura, K, Oota, Y, Nakajima, K, Suzuki, M, Aoki, T, Matsuo, J, ...

Cluster species and cluster size dependence of damage formation by cluster ion impact (2003)

Aoki, T, Matsuo, J, Takaoka, G, Yamada, I

Generation of the large current cluster ion beam (2003)

Seki, T, Matsuo, J, Takaoka, GH, Yamada, I

Molecular dynamics study of damage formation characteristics by large cluster ion impacts (2003)

Aoki, T, Matsuo, J, Takaoka, G

Titanium-dioxide film formation using gas cluster ion beam assisted deposition technique (2003)

Nakatsu, O, Matsuo, J, Omoto, K, Seki, T, Takaoka, G, Yamada, I

Defect characteristics by boron cluster ion implantation (2003)

Aoki, T, Matsuo, J, Takaoka, G, Toyoda, N, Yamada, I

Modeling of surface smoothing process by cluster ion beam irradiation (2003)

Nakai, A, Aoki, T, Seki, T, Matsuo, J, Takaoka, GH, Yamada, I

Hard DLC film formation by gas cluster ion beam assisted deposition (2003)

Kitagawa, T, Yamada, I, Toyoda, N, Tsubakino, H, Matsuo, J, Takaoka, GH, ...

High quality ITO film formation by the simultaneous use of cluster ion beam and laser irradiation (2002)

Takaoka, GH, Yamazaki, D, Matsuo, J

Scanning tunneling microscope observations of Ge deposition on Si(111)-7x7 surfaces irradiated by Xe ions (2002)

Takaoka, GH, Seki, T, Tsumura, K, Matsuo, J

Cluster size effect on reactive sputtering by fluorine cluster impact using molecular dynamics simulation (2001)

Aoki, T, Matsuo, J, Yamada, I

Molecular dynamics and Monte-Carlo simulation of sputtering and mixing by ion irradiation (2001)

Aoki, T, Chiba, S, Matsuo, J, Yamada, I, Biersack, JP

Modification of polycarbonate and polypropylene surfaces by argon ion cluster beams (2001)

Biederman, H, Slavinska, D, Boldyreva, H, Lehmberg, H, Takaoka, G, Matsuo, J, ...

Interaction of SF6 cluster ion beams with Si surface (2001)

Takaoka, GH, Nakamura, S, Seki, T, Matsuo, J

Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment (2000)

Insepov, Z, Manory, R, Matsuo, J, Yamada, I

Polycarbonate surface modified by argon cluster ion beams (1999)

Zemek, J, Yamada, I, Takaoka, G, Matsuo, J

Polycarbonate surface modified by argon cluster ion beams (1999)

Zemek, J, Yamada, I, Takaoka, G, Matsuo, J