Skill assessment in ocean biological data assimilation (2009)
Gregg, W., Friedrichs, M., Robinson, A. R., Rose, K. A., Schlitzer, R., Thompson, K. R., ...
Zimmer, F., Niklaus, F., Lapisa, M., Ludewig, T., Bring, M., Friedrichs, M., ...
Today, spatial light modulators (SLMs) based on individually addressable micro-mirrors play an important role for use in DUV lithography and adaptive optics. Especially the mirror planarity and...
Advances in SLM development for microlithography (2009)
Dauderstädt, U., Askebjer, P., Björnängen, P., Dürr, P., Friedrichs, M., List, M., ...
The Fraunhofer IPMS, in cooperation with Micronic Laser Systems, develops and fabricates micromirror arrays used as spatial light modulators (SLM) for image generation in microlithography. The SLMs...
Friedrichs, M., Bakke, T., Voelker, B., Rudloff, D., Lakner, H.
At Fraunhofer IPMS Dresden micromechanical mirror arrays are developed and fabricated using a high-voltage CMOS process for applications such as lithographic mask writers and adaptive optics....
Large micromechanical mirror arrays (MMA) with analog pixel deflection integrated onto active CMOS address circuitry require both high-quality planar reflective optical surfaces and a stable...
The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications (2008)
Zimmer, F., Friedrichs, M., Lapisa, M., Niklaus, F., Müller, M., Bakke, T., ...
Spatial light modulators (SLMs) based on micro-mirrors for use in DUV lithography and adaptive optics need very high mirror planarity as well as mirror stability. We will present results of new...
Hochauflösende Flächenlichtmodulatoren auf Basis von Mikrospiegelmatrizen (2007)
Wagner, M., Dürr, P., Dauderstädt, U., Gehner, A., Friedrichs, M., ...
Am Fraunhofer Institut für Photonische Mikrosysteme (IPMS), Dresden werden anwendungsspezifische Flächenlichtmodulatoren (Spatial Light Modulators, SLM) auf Basis von hochintegrierten...
Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding (2006)
Bakke, T., Völker, B., Friedrichs, M., Rudloff, D., Schenk, H., Lakner, H.
Jonsson, P.R., Van Duren, L.A., Amielh, M., Asmus, R., Aspden, R.J., Daunys, D., ...
Flume tanks are becoming increasingly important research tools in aquatic ecology, to link biological to hydrodynamical processes. There is no such thing as a “standard flume tank”, and no flume...
Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding (2005)
Bakke, T., Friedrichs, M., Völker, B., Reiche, M., Leonardsson, L., Schenk, H., ...
Spatial light modulators (SLMs) based on micromirrors for use in DUV lithography and adaptive optics require very high mirror planarity as well as mirror stability. The ideal mechanical properties of...
Etch stop materials for release by vapor HF etching (2005)
Bakke, T., Schmidt, J., Friedrichs, M., Völker, B.
The integrity of various materials upon exposure to vapor HF etching was investigated. Whereas silicon nitride did not withstand the vapor HF, it was found that Al2O3 and AlF3 are fully inert, thus...
Drift free, highly planar silicon micromirror arrays (2005)
Völker, B., Friedrichs, M., Rudloff, D., Bakke, T.
Simple monocrystalline silicon micromirror arrays have been fabricated using a CMOS compatible tungsten plug process. Mirror planarity and pre-deflection was characterized. It was found that the...
Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding (2005)
Bakke, T., Friedrichs, M., Völker, B., Reiche, M., Leonardsson, L., Schenk, H., ...
Primary production algorithm round-robin 3 (PPARR3): early results (2004)
Our goal is to provide a framework to systematically compare algorithms which estimate primary production from ocean color.