Advances in SLM development for microlithography (2009)
Dauderstädt, U., Askebjer, P., Björnängen, P., Dürr, P., Friedrichs, M., List, M., ...
The Fraunhofer IPMS, in cooperation with Micronic Laser Systems, develops and fabricates micromirror arrays used as spatial light modulators (SLM) for image generation in microlithography. The SLMs...
Verfahren und Einrichtung zur Reduzierung der Zuendspannung von Plasmen (2004)
Hartung, U., Krause, U., Kopte, T., List, M.
WO2003105543 A UPAB: 20040123 NOVELTY - To reduce the ignition voltage of plasmas, in a vacuum, a different anode configuration is used for ignition which requires a lower voltage than the anode to...
The resistance lowering effect of an additional ZnO-layer in a low-E-system on glass (2002)
Treichel, O., Krause, U., Peters, C., Hartung, U., Tautenhahn, I., ...
Process dynamics of high power pulsed magnetron sputtering for large area coating (2001)
Krause, U., List, M., Mecke, H., Sommer, S.
For the deposition of dielectric thin films Pulsed Magnetron Sputtering (PMS) has become a relevant factor for industrial applications in large area coating of architectural glass. Combination of...
Requirements of power supply parameters for high-power pulsed magnetron sputtering (2001)
Krause, U., List, M., Fuchs, H.
In the last few years a new sputter process technology called Pulsed Magnetron Sputtering (PMS) was developed and has become a relevant factor for industrial applications in large area coating....
Mani, S., Kugler, J. W., Sciortino, D. F., Garcia, J. C., Ansari, R. H., Humerickhouse, R., ...
Background/objectives: Uracil and tegafur in a 4:1 molar concentration ratio (UFT; Bristol-Myers Squibb, Wallingford, CT) has broad anti-tumor activity for cancers arising from the...