SCALABLE CASCADED SNAP-IN ACTUATORS FOR LARGE-STROKE DISPLACEMENTS (2009)
Golay, N., Masse, A., Pétremand, Y., Noell, W., Manceau, J.F., De Rooij, N.F.
This paper will focus on the design, and first measurements of a cascaded in-plane parallel plate snap-in actuator. The actuator is based on a rather simple microfabrication process and can achieve a...