N. Sydorenko

Negative Ions in Helicon Oxygen Discharges (2009)

Sydorenko, N, Grulke, O., Matyash, K., Schneider, R., Ullrich, S., Klinger, T.

Measurements of the negative ion concentration in argon-oxygen discharges using photodetachment

Sydorenko, N., Grulke, A., Stark, A, Klinger, T.

The formation of negative ions has attracted attention in plasma processing application like e.g. semiconductor fabrication, where negative ions can considerably effect in the etching quality. High...

Detection of the negative ion density in oxygen helicon discharges

Sydorenko, N., Grulke, O., Klinger, T.

Electronegativity of low pressure high-density oxygen discharges

Sydorenko, N., Grulke, O., Klinger, T., Schneider, R., Matyash, K.

Dynamical response in magnetized negative ion plasmas

Grulke, O., Klinger, T., Rahbarnia, K., Sydorenko, N., Ullrich, S.

Comparative negative ion density measurements in oxygen dc-glow, rf-CCP and helicon discharges

Pasedag, D., Testrich, H., Dittmann, K., Sydorenko, N.