Advances in SLM development for microlithography (2009)
Dauderstädt, U., Askebjer, P., Björnängen, P., Dürr, P., Friedrichs, M., List, M., ...
The Fraunhofer IPMS, in cooperation with Micronic Laser Systems, develops and fabricates micromirror arrays used as spatial light modulators (SLM) for image generation in microlithography. The SLMs...