42 ENERGY FOR AUTONOMOUS MICROSYSTEMS Energy Harvesting for Autonomous Microsystems (2008)
P. Woias, Y. Manoli, T. Nann, F. V. Stetten
Today, we are surrounded by a high diversity of distributed and decentralized systems. Pilot applications are easily identified with mobile phone, notebook and PDA. However, distributed systems –...
Handhabung von Aerosolen in Mikrostrukturen (2008)
Wengeler, R., Heim, M., Kockmann, N., Woias, P., Nirschl, H., Kasper, G.
Mikrostrukturierte Apparate zur Synthese von Nanopartikeln (2008)
Kockmann, N., Kastner, J., Dreher, S., Woias, P., Wengeler, R., Nirschl, H., ...
Virtuelle Messgeräte - Definition und Stand der Entwicklung (2008)
Schmitt, R., Koerfer, F., Sawodny, O., Zimmermann, J., Krüger-Sehm, R., Min, X., ...
Micro- and nanotechnology experienced a high economic growth in recent years. This yields in a growing demand for measuring instruments which are closely linked to the production process. Virtual...
A planar multipole ion trap (2007)
Debatin, M., Kröner, M., Mikosch, J., Trippel, S., Morrison, N., Reetz-Lamour, M., ...
We report on the realisation of a chip-based multipole ion trap manufactured using micro-electromechanical systems (MEMS) technology. It provides ion confinement in an almost field-free volume...
Hanemann, T., Bauer, W., Knitter, R., Woias, P.
Leondes, C.T. [Hrsg.]
Piezoelektrisch betaetigtes Mikroventil (2001)
The microvalve has a base body (34) with a flow opening controlled by a valve element (14), supported by a mounting (12) associated with a piezoelectric drive (10), supplied with an operating voltage...
Pneumatic silicon microvalves with piezoelectric actuation (2000)
Weinmann, M., Post, P., Vollmer, H., Wanner, R., Kluge, S., Woias, P.
Mikromechanische Aktorstruktur und Mikroventil (2000)
Kluge, S., Woias, P., Schmid, A.
EP 1008765 A UPAB: 20000807 NOVELTY - The micro-mechanical actuator has a separate actuator element (30,32) on at least two sections of the suspension system (22), to trip the valve lifter (20). The...
Linnemann, R., Richter, M., Kluge, S., Woias, P.
The micromembrane pump has a pump membrane (110). This is moved by a drive device (100) into a first and a second position. The pump also has a pump body (102) connected to the pump membrane to...
Mikromechanische Transmissionsmesszelle (2000)
The transmission measuring cell determines the optical absorption of a sample fluid. A light passage opening introduces light in the container (12). A reflector unit (26) aligns the light in such a...
Mikromechanisch gefertigte Flussrestriktionsvorrichtung (2000)
The system has a passage opening (12) formed in the first main surface of the substrate (10), with a duct (16) formed in a second main surface of the substrate, communicating fluidly with the passage...
Medikamenten-Dosiervorrichtung (2000)
Apparatus for the delivery of dosed medication has a fixed and an exchangeable unit. The exchangeable section has a fluid reservoir (20) to take the fluid medication under pressure, a sensor (28) to...
A silicon micropump with a high bubble tolerance and self-priming capability (1999)
Woias, P., Linnemann, R., Richter, M., Leistner, A., Hillerich, B.
Langzeitstabiler Nitrat-Eintauchsensor auf Basis ionensensitiver Feldeffekttransistoren (1998)
Yacoub-George, E., Rampf, R., Meixner, L., Koch, S., Woias, P., Drost, S.
Verfahren zum Herstellen eines Mikromembranpumpenkoerpers (1998)
Linnemann, R., Richter, M., Kluge, S., Woias, P.
The method is used to manufacture a pump body with an inlet opening having an inlet valve (106) and an outlet opening having an outlet valve (108). The method involves structuring a first main...
Slow pH response effects of silicon nitride ISFET sensors (1998)
Woias, P., Meixner, L., Fröstl, P.
To examine the slow pH response of ion sensitive field effect transistors (ISFETs) with a silicon nitride gate-insulator, measurements were carried out in a thermostated measurement set-up by...
A silicon microreactor for immunological applications (1998)
Woias, P., Richter, M., Schoenebeck, U. Von, Yacoub-George, E., Wolf, H., Abel, T., ...
A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases (1998)
Linnemann, R., Woias, P., Ditterich, J.A.
In this paper a novel silicon micropump for liquids and gases is presented, which is tolerant towards gas-bubbles and which is able to prime itself. The micropump is based on a piezoelectrically...
Robust design of gas and liquid micropumps (1998)
Richter, M., Linnemann, R., Woias, P.
Due to the small stroke of microactuators, the compression ratio of micropumps is frequently small. This means that serious constraints exist for most micropump designs concerning self-priming...
Kluge, S., Klink, G., Woias, P.
In this contribution we present an electrostatically actuated microvalve to be used both as a pneumatic switch and as a gas flow regulator. The normally open 2/2-way valve consists of two...
Mikropumpe für Flüssigkeiten und Gase (1997)
Linnemann, R., Richter, M., Kluge, S., Woias, P., Hillerich, B.
Microsystem for flow injection analysis for environmental control (1997)
Drost, S., Wörmann, W., Woias, P., Ross, B., Chemnitius, G., Köster, O., ...
Flow injection analysis systems are often used to enhance the performance of chemical sensors. To reduce the liquid consumption of such a system microtechniques offer many possibilities. There are...
Microchannels for applications in liquid dosing and flow-rate measurement (1997)
Richter, M., Woias, P., Weiss, D.
To investigate the performance of microengineered fluid channels in liquid dosing applications, flow-rate measurements have been performed with various channel geometries in a range from 0.01 to 1000...
Microanalytical system for environmental control (1997)
Drost, S., Wörmann, W., Woias, P., Ross, B., Köster, O., Konz, W., ...
Flow injection analysis systems are often used to enhance the performance of chemical sensors. To reduce the fluid consumption of such a system, microtechniques offer many possibilities. In this...
Full-wafer mounting technologies for silicon micropumps (1997)
Linnemann, R., Richter, M., Kluge, S., Klink, G., Landesberger, C., Woias, P.
A chemical microanalysis system as a microfluid system demonstrator (1997)
Richter, M., Prak, A., Naundorf, J., Eberl, M., Leeuwis, H., Woias, P., ...
An integrated microfluid demonstrator with outer dimensions of 19.5*43 mm2 was developed comprising three micro pumps, three flow sensors, two conductivity sensors and two passive check valves. The...
Verfahren und Vorrichtung zur Bestimmung eines Stroemungspotentials (1996)
A process and a device serve to determine the streaming potential, in particular to record the surface characteristics of a sample or to record a component contained in a sample fluid. The device...
A process and a measurement setup to detect a sample material in a fluid by means of an ISFET, whose gate isolator is provided with a receptor layer, whereby a signal of a known frequency is applied...
Slow effects in the pH-step response of silicon nitride ISFET sensors (1996)
Woias, P., Meixner, L., Fröstl, P.
Investigations has been carried out with S3N4-gateinsulator ISFETs to get a more complete database and a deeper understanding of the underlying physical and electrochemical effects. In this study the...
Silizium-Mikroventil mit definiertem Einsatzschwelldruck (1996)
Richter, M., Woias, P., Schaber, U., Lohr, T.
Gegenstand dieses Artikels ist der technologische Aufbau, die meßtechnische Charakterisierung und die theoretische Beschreibung von passiven Rückschlagventilen aus Silizium, deren Ventilklappe...
A silicon micromachined open tubular reactor for immunosensor applications (1996)
Woias, P., Richter, M., Yacoub-George, E., Wolf, H., Abel, T.
In this publication, a micromachined open tubular reactor is presented, which has been developed for the rapid and reliable performance of heterogeneous immunoassays in a miniatunzed chemical...
A silicon micro valve with defined threshold pressure (1996)
Richter, M., Woias, P., Schaber, U., Lohr, T.
Micro membrane pumps with passive check valves exhibit the inherent problem of free flow, if an overpressure exists at the inlet port. Therefore, unwanted fluidic short circuits can occur in a mu...
Results of the development of sensors and myTAS-modules (1996)
Hinkers, H., Conrath, N., Czupor, N., Frebel, H., Hüwel, S., Köckemann, K., ...
Sensors in different silicon technologies and microfluid devices have been developed. They are designed to be integrated in a modular myTAS. All process steps including the biocomponent and...
Yacoub-George, E., Wolf, H., Koch, S., Woias, P.
A universal ELISA-based analytical system is described, which consists of a flow-through set-up with a pretreated fused silica capillary as a reaction cartridge and an ISFET array as a detector. The...
Derzeit befinden sich über ein Dutzend verschiedene Mikropumpen in der Entwicklung. Den meisten ist gemeinsam, daß ein Großteil ihrer Einzelteile aus Silizium gefertigt wird. Da dieser Werkstoff...
Mikroelektronik liefert Grundlagen für Mikropumpen (1996)
Kluge, S., Mellmann, J., Rischer, C., Woias, P.
Bei Mikropumpen gibt es mehrere verschiedene Funktionsprinzipien. Den meisten derzeit in Entwicklung befindlichen Pumpen ist gemeinsam, daß ein Großteil ihrer Einzelteile aus Silizium gefertigt...
Micropumps and microfluid components for myTAS applications (1996)
Woias, P., Richter, M., Kluge, S., Abel, T.
In this publication a summary of the research on micropumps and microfluid components for mu mTAS applications is given, which has been conducted in the framework of the research projects VIMAS and...
A micromachined open tubular reactor for immunosensor applications (1996)
Woias, P., Richter, M., Yacoub-George, E., Wolf, H., Abel, T.
A micromachined open tubular reactor is presented, which was developed with special focus on the application in heterogeneous immunoassays such as the Enzyme Linked Immunosorbent Assay (ELISA). In...
A micro mechanical system for liquid dosage and nebulization (1996)
Temmel, G., Hermes, T., Paneva, R., Kluge, S., Woias, P.
In this publication, a micromachined compact system for liquid dosage and nebulization is presented for the first time. The system combines two elements, produced by silicon micromachining: a micro...
A micro mechanical system for liquid dosage and nebulization (1996)
Kluge, S., Hermes, T., Paneva, R., Temmel, G., Woias, P.
In several applications it is required to nebulize small amounts of liquid with a special rate. In this paper, a micro machined compact system for liquid dosage and nebulization is presented. The...
A micro fluid system for liquid dosage and nebulization (1996)
Kluge, S., Woias, P., Paneva, R., Hermes, T., Temmel, G.
In this contribution, a novel micromachined compact system for liquid dosage and nebulization is presented, which has been developed for anaesthetic applications. The present knowledge about...
Micro channels for applications in liquid dosing and flow rate measurement (1996)
Richter, M., Woias, P., Weiß, D.
To investigate the performance of microengineered fluid channels in liquid dosing applications, flow rate measurements were performed with various channel geometries in a range from 0.01 ml/min up to...
Medikamentendosierung mit Mikro-Flußrestriktionen (1996)
Gegenstand dieses Artikels ist der Einsatz von Mikro-Flußrestriktionen zur Medikamenten-Feindosierung mittels des Überdruckprinzips. Gegenüber konventionellen Restriktionen ergeben sich bei...
Development of a micro-fluid system as a demonstrator for a myTAS (1996)
Richter, M., Prak, A., Naundorf, J., Eberl, M., Leeuwis, H., Woias, P., ...
An integrated micro-fluid demonstrator was developed to investigate the design methodology for micro-engineered fluid devices. The micro fluid system comprises three micro pumps, three flow sensors,...
Ionensensitive Feldeffekttransistoren, Übersicht über Entwicklungsstand und -trends (1994)
Drost, S., Hein, P., Müller, E., Woias, P., Koch, S., Meixner, L., ...
Der Ionensensitive Feldeffekttransistor (ISFET), ein sehr häufig untersuchter chemischer Sensor, dient zum Nachweis von Substanzen in Flüssigkeiten und wird zu den elektrochemischen Sensoren...
Development and evaluation of biosensors for HIV-serology (1991)
Aberl, F., Wolf, H., Woias, P., Koch, S., Kößlinger, C., Drost, S.
During the last decade a new generation of sensors, the biosensors, has been developed for the quantitative measurement of biological substances. In serological diagnosis the rapid and sensitive...
A quartz crystal biosensor for measurment in liquids (1990)
Kößlinger, C., Drost, S., Aberl, F., Wolf, H., Koch, S., Woias, P.
The detection of anti-HIV antibodies by means of synthetic HIV-peptide immobilized on a piezoelectric quartz sensor is demonstrated. The measurement set-up consists of an oscillator circuit, a...