Friction of flat-flat micro contacts coated with amorphous carbon (2009)
Paulkowski, D., Bandorf, R., Schiffmann, K., Bräuer, G.
The friction of flat-flat micro contacts was investigated using a flat punch at a Hysitron TriboIndenter®. The studied micro contacts were patterned in p-doped Si(100) using photolithography and...
Studies on diamond-like carbon coatings for the application in micro actuators (2008)
Paulkowski, D., Bandorf, R., Achilles, S., Pape, F., Gatzen, H.H., Bräuer, G.
Minimizing wear and friction in the contact area of the sliding parts of Micro-Electro- Mechanical System (MEMS) components is of utmost importance for the functionally and reliability. Diamond-like...
Bandorf, R., Lüthje, H., Biehl, S., Diehl, W.
The first techniques for rapid prototyping became available in the late 1980s and were used to produce models and prototype parts. Today,they are used for a much wider range of applications and are...
HIPIMS/HPPMS process design with multi channel pulse pattern controller (2008)
Wallendorf, T., Vergöhl, M., Werner, O., Bandorf, R.
HIPIMS/HPPMS as promising sputter technology uses highly ionized particles to grow thin films from metallic or ceramic targets. [1,2,3,4]. The ionization degree of the plasma is strongly related to...
Properties of Nichrome sputtered by HIPIMS in unipolar and DC-superimposed mode (2008)
Bandorf, R., Falkenau, S., Schiffmann, K., Gerdes, H., Heckmann, U.
Nichrome(Ni-Cr) alloys are a common used material for strain gauges. Using High Power Impulse Magnetron Sputtering (HIPIMS) the properties of the film are modified compared to dc-sputtering. In this...
Smart coatings for intelligent surfaces (2008)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Research on promising applications for high power pulse magnetron sputtering (2008)
Sittinger, V., Szyszka, B., Bandorf, R., Vergöhl, M., Pflug, A., Christie, D.J., ...
High-power pulse magnetron sputtering (HPPMS) attracts many researchers`attention due to the high degree of sputtered material ionization during the coating process. The material ionization has...
Vorrichtung und Verfahren zur Kontrolle der kraftschluessigen Verbindung zweier Koerper (2007)
Luethje, H., Biehl, S., Bandorf, R., Sick, J.
DE 102005048384 B3 UPAB: 20070206 NOVELTY - The device has two laminar construction units arranged flat one on top of the other (1, 2). One of the surfaces of the construction units has a pressure...
Piezoresistive effect in amorphous carbon thin films (2007)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Luthje, H.
In this contribution amorphous carbon (a-C) films are integrated as strain gauges in micromachined silicon boss membranes. Sputter deposited a-C films have high hardness and < 2 % hydrogen content in...
Diamond-like carbon for MEMS (2007)
Peiner, E., Tibrewala, A., Bandorf, R., Lüthje, H., Doering, L., Limmer, W.
Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with respect to micro electro mechanical systems (MEMS) applications. Sputtered a-C with a content of...
Hart- und weichmagnetische Materialien für elektromagnetische Mikroaktoren (2007)
Bedenbecker, M., Bandorf, R., Bräuer, G., Lüthje, H., Gatzen, H.H.
Ein wichtiger Aspekt der Entwicklung elektromagnetischer Mikroaktoren ist die Erforschung geeigneter Materialien sowie die Entwicklung der entsprechenden Abscheide- und Strukturierungsprozesse. Im...
Mechanical and piezoresistive properties of diamond-like carbon for MEMS (2007)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
Diamond-like carbon (DLC) was investigated as structural and functional material for MEMS applications. Integrated into standard bulk silicon micromachining, the processing of DLC benefited from a...
Vergöhl, M., Bandorf, R., Mark, G.
DE 102007011230 A1 UPAB: 20080930 NOVELTY - The system has two diodes connected opposite to each other and arranged at a connection of a set of outputs of a voltage source (10) i.e. adjustable direct...
WO 2009000391 A1 UPAB: 20090116 NOVELTY - Mechanical components (I) comprises at least a partial coating containing at least a compound (II), where at least one partial surface of the coating can be...
Microtribological behaviour of thin DLC films using different testing methods (2006)
Bandorf, R., Lüthje, H., Staedler, T.
To enhance the lifetime and reliability of microcomponents, thin microtribological films are applied to microparts. With reduction of the component size, investigation methods for tribological...
DiaForce Dünnschichtsensoren zur Kraftmessung in extrem steifen adaptronischen Anwendungen (2006)
Lüthje, H., Biehl, S., Bandorf, R., Melz, T., Mayer, D.
This paper deals with novel thin film sensors for measurement of load and temperature in adaptronic applications. The sensor consists of a thin layer of diamond-like-carbon and can be fabricated with...
Micro force sensor with piezoresistive amorphous carbon strain gauge (2006)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
In this contribution we report for the first time on the successful integration of amorphous carbon (a-C) as a piezoresistive strain gauge into a silicon micro cantilever force sensor....
Development and fabrication of magnetic thin films (2006)
Bedenbecker, M., Bandorf, R., Luethje, H., Braeuer, G., Gatzen, H.H.
For designing and fabricating electromagnetic microactuators as pursued within the collaborate research center "Design and Fabrication of Active Microsystems" (Sonderforschungsbereich 516), soft and...
Lüthje, H., Biehl, S., Bandorf, R.
This contribution deals with novel surface integrated thin film sensors which were developed for use at various mechanical components and tools. In general the sensors consist of hard coatings with...
Intelligente Schichten für "denkende Oberflächen" (2006)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Entwicklung und Fertigung magnetischer Schichten (2005)
Bedenbecker, M., Bandorf, R., Lüthje, H., Bräuer, G.
Da die erreichbaren Kräfte bei linearen elektromagnetischen Mikromotoren einerseits vom erreichbaren magnetischen Fluss abhängen, andererseits möglichst geringe Dimensionen der Flussführung...
Lüthje, H., Biehl, S., Bandorf, R., Peiner, E., Tibrewala, A.
Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an...
Micro force sensor with piezoresistive amorphous carbon strain gauge (2005)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
In this contribution, we report for the first time on a piezoresistive amorphous carbon (a-C) strain gauge successfully integrated into a silicon micro cantilever force sensor. Amorphous carbon was...
Waelzlager mit integrierter Zustandsmessung (2004)
Luethje, H., Biehl, S., Bandorf, R.
DE 10313060 A UPAB: 20041117 NOVELTY - A roller bearing or friction-type bearing has a sensor for determining the loading on the bearing and a tribological layer between surfaces moving on/over one...
Submicron coatings for micro-tribological applications (2004)
Bandorf, R., Lüthje, H., Schiffmann, K., Beck, M., Schmidt, M., ...
The miniaturisation of mechanical components and machines enables innovative future products. However, for the improvement of functionality, reliability and lifetime of those micro systems, micro...
Influencing factors on microtribology of DLC films for MEMS and microactuators (2004)
Bandorf, R., Lüthje, H., Staedler, T.
Due to the low coefficient of friction and the high hardness of diamond-like carbon films they are very interesting for application of microtribological coatings for MEMS and microactuators. In...
VORRICHTUNG UND VERFAHREN ZUR UEBERWACHUNG UND STEUERUNG EINES FAHRZEUGS (2004)
Luethje, H., Bandorf, R., Biehl, S.
WO2004048912 A UPAB: 20040702 NOVELTY - System to control and/or monitor and/or regulate a vehicle or aircraft has a sensor to receive an operating condition value, and a signal processing unit. The...
Bandorf, R., Lüthje, H., Wortmann, A., Staedler, T., Wittorf, R.
Submicron diamond-like carbon films (DLC) were prepared on substrate materials with different Young's modulus (silicon, glass, polymers) by PACVD using a Ar/C2H2 gas mixture at temperatures below 150...
Vorrichtung zur Kontrolle kraftschluessiger Verbindungen (2003)
Luethje, H., Biehl, S., Bandorf, R., Sick, J.
WO2003087751 A UPAB: 20031117 NOVELTY - The device (1) has force application elements (2a,2b) and at least one measurement element (3) that is provided in at least on some regions with a coating (4)...