R. Preu

LASER TECHNOLOGY FOR CONTACTING HIGH-EFFICIENCY SILICON SOLAR CELLS THE LASER-FIRED CONTACTS APPROACH (2009)

A. Grohe, J. Nekarda, M. Hofmann, J. Catoir, B. Fleischhauer, E. Schneiderlöcher, ...

Conventional solar cell manufacturing based on screen-printing metallization implies several inherent dawbacks related to the technologies used as well as to the featured cell structure....

Selective laser ablation of SiNx layers on textured surfaces for low temperature front side metallizations (2009)

Knorz, A., Peters, M., Grohe, A., Harmel, C., Preu, R.

For an alternative front side metallization process without screen printing of metal paste the selective opening of the front surface anti-reflection coating could be realized by laser ablation. A...

Industrially feasible multi-crystalline metal wrap through (MWT) silicon solar cells exceeding 16% efficiency (2009)

Clement, F., Menkoe, M., Kubera, T., Harmel, C., Hoenig, R., Wolke, W., ...

On the way to higher efficiencies, back contact solar cells seem to be a promising alternative to the conventional screen-printed solar cells. Especially, the metal wrap through (MWT) solar cell...

Microscopic homogeneity of emitters formed on textured silicon using in-line diffusion and phosphoric acid as the dopant source (2009)

Voyer, C., Buettner, T., Bock, R., Biro, D., Preu, R.

An important point of comparison between POCl3 emitter diffusion in a quartz tube furnace and in-line diffusion using sprayed phosphoric acid is the microscopic homogeneity of the diffusion, i.e. the...

Recent developments in rear-surface passivation at Fraunhofer ISE (2009)

Hofmann, M., Janz, S., Schmidt, C., Kambor, S., Suwito, D., Kohn, N., ...

Fraunhofer ISE has a long experience in the field of surface passivation for crystalline silicon wafers. Novel rear-surface passivation layer systems have led to excellent results. Using a...

Physical understanding of the behavior of silver thick-film contacts on n-type silicon under annealing conditions (2009)

Kontermann, S., Hörteis, M., Kasemann, M., Grohe, A., Preu, R., Pink, E., ...

High-efficiency silicon solar cells with evaporated front contacts and an oxide-passivated rear require post metallization annealing (PMA). In an industrial environment the evaporated front contacts...

PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells (2008)

M. Hofmann, S. Kambor, C. Schmidt, D. Grambole, J. Rentsch, S. W. Glunz, ...

A novel plasma-enhanced chemical vapour deposited (PECVD) stack layer system consisting of a-SiOx:H, a-SiNx:H, and a-SiOx:H is presented for silicon solar cell rear side passivation. Surface...

Stack system of PECVD amorphous silicon and PECVD silicon oxide for silicon solar cell rear side passivation (2008)

Hofmann, M., Schmidt, C., Kohn, N., Rentsch, J., Glunz, S.W., Preu, R.

A stack of hydrogenated amorphous silicon (a-Si) and PECVD-silicon oxide (SiOx) has been used as surface passivation layer for silicon wafer surfaces. Very good surface passivation could be reached...

PECVD-ONO: A new deposited firing stable rear surface passivation layer system for crystalline silicon solar cells (2008)

Hofmann, M., Kambor, S., Schmidt, C., Grambole, D., Rentsch, J., Glunz, S.W., ...

PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells (2008)

M. Hofmann, S. Kambor, C. Schmidt, D. Grambole, J. Rentsch, S. W. Glunz, ...

A novel plasma-enhanced chemical vapour deposited (PECVD) stack layer system consisting of a-SiOx:H, a-SiNx:H, and a-SiOx:H is presented for silicon solar cell rear side passivation. Surface...

Series resistance characterization of industrial silicon solar cells with screen-printed contacts using hotmelt paste (2007)

Mette, A., Pysch, D., Emanuel, G., Erath, D., Preu, R., Glunz, S.W.

This work presents the results of a detailed series resistance characterization of silicon solar cells with screen-printed front contacts using hotmelt silver paste. Applying the hotmelt technology...

Method for determination of recombination activity of cylindric conduction channels for back-contacted solar cells (2007)

Mingirulli, N., Biro, D., Preu, R., Glunz, S.W., Riepe, S.

Investigations of diffusion barriers for application in back-contacted solar cells (2007)

Drießen, M., Mingirulli, N., Pingel, S., Schubert, M., Biro, D., Preu, R.

Pilot-line processing of very large (21 x 21 cm²) and thin mc-Si solar cells (2007)

Clement, F., Preu, R., Reis, I.E., Biro, D., Rentsch, J., Zimme, M., ...

Processing and comprehensive characterisation of screen-printed mc-Si Metal Wrap Through (MWT) solar cells (2007)

Clement, F., Lutsch, M., Kubera, T., Kasemann, M., Kwapil, W., Harmel, C., ...

Firing stable surface passivation using all-PECVD stacks of SiOx:H and SiNx:H (2007)

Hofmann, M., Kambor, S., Schmidt, C., Grambole, D., Rentsch, J., Glunz, S.W., ...

Detailed analysis of amorphous silicon passivation layers deposited in industrial in-line and laboratory-type PECVD reactors (2007)

Hofmann, M., Schmidt, C., Kohn, N., Grambole, D., Rentsch, J., Glunz, S.W., ...

Laser processes for the industrial production of high efficiency silicon solar cells (2007)

Grohe, A., Nekarda, J., Knorz, A., Harmel, C., Wütherich, T., Mingirulli, N., ...

Lifetime studies on laser drilled vias for application in emitter-wrap-through-solar cells (2007)

Mingirulli, N., Grohe, A., Dohrn, A., Hofmann, M., Schubert, M., Roth, T., ...

Thermal oxidation and wet chemical cleaning of silicon wafers for industrial solar cell production (2007)

Lemke, A., Furtwängler, H., Rentsch, J., Biro, D., Preu, R.

Industrial realization of dry plasma etching for PSG removal and rear side emitter etching (2007)

Rentsch, J., Decker, D., Hofmann, M., Schlemm, H., Roth, K., Preu, R.

Investigations on the influence of different annealing steps on silicon solar cells with silver thick-film contacts (2007)

Kontermann, S., Grohe, A., Erath, D., Preu, R., Willeke, G.

Mechanisms involved in the formation of phosphosilicate glass by dehydration of sprayed phosphoric acid in an in-line diffusion furnace (2007)

Voyer, C., Biro, D., Buettner, T., Preu, R.

Phosphorus gettering and multi-crystalline silicon solar cells using in-line diffusion and sprayed phosphoric acid as the dopant source (2007)

Voyer, C., Biro, D., Buettner, T., Preu, R.

Silicon solar cells with screen-printed front side metallization exceeding 19% efficiency (2007)

Schultz, O., Mette, A., Preu, R., Glunz, S.W.

Progress in selective laser ablation of dielectric layers (2007)

Knorz, A., Grohe, A., Harmel, C., Preu, R., Luther, J.

PV-TEC - Forschungsfabrik für Solarzellen (2007)

Preu, R.

Verfahren zur Präzisionsbearbeitung von Substraten und dessen Verwendung (2007)

Mayer, K., Aleman, M., Kray, D., Glunz, S., Mette, A., Preu, R., ...

WO 2008107194 A2 UPAB: 20080930 NOVELTY - In a precision process to modify the microstructure of a thin layer for the local introduction of doping agents and local application of a seed layer, the...

Pv-Tec: Photovoltaic technology evaluation center: Design and implementation of a production research unit (2006)

Biro, D., Preu, R., Glunz, S., Rein, S., Rentsch, J., Emanuel, G., ...

PECVD PSG as a dopant source for industrial solar cells (2006)

Benick, J., Rentsch, J., Schetter, C., Voyer, C., Biro, D., Preu, R.

Laser applications in crystalline silicon solar cell production (2006)

Grohe, A., Preu, R., Glunz, S.W., Willeke, G.

Boundary conditions for the industrial production of LFC cells - Results from the joint project INKA (2006)

Grohe, A., Catoir, J., Fleischhauer, B., Preu, R., Glunz, S.W., Willeke, G.P.

Boundary conditions for the industrial production of LFC cells (2006)

Grohe, A., Fleischhauer, B., Preu, R., Glunz, S.W., Willeke, G.P.

Selective laser ablation of anti-reflection coatings for novel metallization techniques (2006)

Grohe, A., Harmel, C., Knorz, A., Glunz, S., Preu, R., Willeke, G.

21%-efficient silicon solar cells using amorphous silicon rear side passivation (2006)

Hofmann, M., Glunz, S., Preu, R., Willeke, G.

Characterisation of silver thick-film contact formation on textured monocrystalline silicon solar cells (2006)

Kontermann, S., Emanuel, G., Benick, J., Preu, R., Willeke, G.

Technology route towards industrial application of rear passivated silicon solar cells (2006)

Rentsch, J., Schultz, O., Grohe, A., Biro, D., Preu, R., Willeke, G.

The status of silicon solar cell production technology development at Fraunhofer ISE (2006)

Preu, R., Biro, D., Rentsch, J., Emanuel, G., Grohe, A., Hofmann, M.

High efficiencies on large area screen printed silicon solar cells and contacting high (2006)

Mette, A., Emanuel, G., Erath, D., Preu, R., Willeke, G.

High-efficiency solar cells with laser-grooved buried contact front and laser-fired rear for industrial production (2006)

Schultz, O., Glunz, S., Warta, W., Preu, R., Grohe, A., Hermle, M., ...

Fabrication of textured solar cells using sprayed phosphoric acid as the dopant source for the in-line emitter diffusion (2006)

Voyer, C., Biro, D., Wagner, K., Benick, J., Preu, R.

Successful market entry of applied materials' ATON (TM) system for sputtered SiN:H (2006)

Trassl, R., Ratschat, H., Daube, C., Wieder, S., Wolke, W., Preu, R.

Verfahren zum Aufbringen von elektrischen Kontakten auf halbleitende Substrate, halbleitendes Substrat und Verwendung des Verfahrens (2006)

Aleman, M., Mette, A., Glunz, S., Preu, R.

DE 102006040352 B3 UPAB: 20071031 NOVELTY - The method involves applying a layer of metallic powder (4) on a semiconductor substrate e.g. solar cell, and guiding a laser beam over the substrate for...

Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung (2006)

Biro, D., Preu, R., Rentsch, J.

WO 2008028625 A2 UPAB: 20080417 NOVELTY - The method involves coating a surface area of a semiconductor substrate with a layer (3) of doping material, which comprises amorphous silicon, silicon...

Boundary conditions for the industrial production of LFC cells - Results from the joint project INKA (2006)

Grohe, A., Catoir, J., Fleischhauer, B., Preu, R., Glunz, S.W., Willeke, G.P.

Pv-Tec: Photovoltaic technology evaluation center: Design and implementation of a production research unit (2006)

Biro, D., Preu, R., Glunz, S., Rein, S., Rentsch, J., Emanuel, G., ...

PECVD PSG as a dopant source for industrial solar cells (2006)

Benick, J., Rentsch, J., Schetter, C., Voyer, C., Biro, D., Preu, R.

Economical and ecological aspects of plasma processing for industrial solar cell fabrication (2005)

Rentsch, J., Jaus, J., Roth, K., Preu, R.

Isotropic plasma texturing of mc-Si for industrial solar cell fabrication (2005)

Rentsch, J., Kohn, N., Bamberg, F., Roth, K., Peters, S., Ludemann, R., ...

Industrialisation of dry phosphorus silicate glass etching and edge isolation for crystalline silicon solar cells (2005)

Rentsch, J., Schetter, C., Schlemm, H., Roth, K., Preu, R.

Texturing of multicrystalline silicon by laser ablation (2005)

Rentsch, J., Bamberg, F., Schneiderlöchner, E., Preu, R.

Laser soldering - A technology for better contacts? (2005)

Schmidhuber, H., Klappert, S., Stollhof, J., Erfurt, G., Preu, R.

Progress in the use of sprayed phosphoric acid as an inexpensive dopant source for industrial solar cells (2005)

Voyer, C., Biro, D., Wagner, K., Benick, J., Preu, R., Koriath, J., ...

Surface passivation for solar cells by large scale inline sputtering of silicon nitride (2005)

Wolke, W., Preu, R., Catoir, J., Emanuel, G., Ruske, M., Liu, J.

Determining trade-offs between costs of production and cell/module-efficiency with the concept of indifference curves (2005)

Jaus, J., Rentsch, J., Preu, R.

Hot melt ink for the front side metallisation of silicon solar cells (2005)

Mette, A., Erath, D., Ruiz, R., Emanuel, G., Kasper, E., Preu, R.

Experimental investigation towards high throughput rapid thermal firing of EFG SI solar cells (2005)

Horzel, J., Grupp, G., Preu, R., Schmidt, W.

Peak firing temperature dependence of the microstructure of Ag thick-film contacts on silicon solar cells - A detailed AFM study of the interface (2005)

Grupp, G., Huljic, D.M., Preu, R., Willeke, G., Luther, J.

Progress in the characterisation of laser-fired contacts (2005)

Grohe, A., Zastrow, U., Meertens, D., Houben, L., Brendle, W., Bilger, G., ...

Status and advancement in transferring the laser-fired contact technology to screen-printed solar cells (2005)

Grohe, A., Schneiderlöchner, E., Fleischhauer, B., Hofmann, M., Glunz, S.W., Preu, R., ...

Comparison of different dielectric passivation layers for application in industrially feasible high-efficiency crystalline silicon solar cells (2005)

Glunz, S.W., Grohe, A., Hermle, M., Hofmann, M., Janz, S., Roth, T., ...

Low temperature back contact for high efficiency silicon solar cells (2005)

Brendle, W., Nguyen, V., Brenner, K., Rostan, P., Grohe, A., Schneiderlöchner, E., ...

Verfahren zur Verminderung der Reflexion an Halbleiteroberflaechen (2005)

Schneiderloechner, E., Rentsch, J., Preu, R.

DE 10352423 B UPAB: 20050124 NOVELTY - Process for reducing the reflection on semiconductor surfaces comprises subjecting one or more regions to dry chemical etching, in which the aspect ratio of...

Analysis of silver thick-film contact formation on industrial silicon solar cells (2005)

Grupp, G., Biro, D., Emanuel, G., Preu, R., Schitthelm, F., Willeke, G.

Ökonomische und ökologische Bewertung von Inline-Plasmaätzverfahren zur Herstellung von Siliziumsolarzellen (2004)

Jaus, J., Rosen, J., Willeke, G., Preu, R., Rentsch, J.

Diplomarbeit an der Universiät Karlsruhe (Technische Hochschule), Fachbereich Wirtschaftswissenschaften, Institut für Industriebetriebslehre und Industrielle Produktion. Angefertigt am...

Verfahren zur Herstellung eines Halbleiter-Metallkontaktes durch eine dielektrische Schicht (2003)

Preu, R., Schneiderloechner, E., Glunz, S., Luedemann, R.

WO 200225742 A UPAB: 20020711 NOVELTY - The method involves applying a metal coating to the dielectric layer and heating the metal coating temporarily at a point or line under monitoring to form a...

Comparison of texturing methods for monocrystalline silicon solar cells using KOH and Na2CO3 (2003)

Sparber, W., Schultz, O., Preu, R., Borchert, D.

Scanning ND:YAG laser system for industrial applicable processing in silicon solar cell manufacturing (2003)

Schneiderlöchner, E., Grohe, A., Glunz, S.W., Preu, R., Willeke, G.

Plasma etching for industrial in-line processing of c-Si solar cells (2003)

Rentsch, J., Emanuel, G., Schetter, C., Aumann, T., Theirich, D., Gentischer, J., ...

Technology path to the industrial production of highly efficient and thin c-Si solar cells (2003)

Preu, R., Biro, D., Emanuel, G., Grohe, A., Hofmann, M., Huljic, D.M., ...

Characterization of laser-fired contacts processed on wafers with different resistivity (2003)

Grohe, A., Schneiderlöchner, E., Walz, S., Glunz, S.W., Preu, R., Willeke, G., ...

Analysis of laser-fired local back surface fields using n+np+ cell structures (2003)

Glunz, S.W., Grohe, A., Schneiderlochner, E., Preu, R., Hermle, N., Dicker, J., ...

Lifetime improvements of multicrystalline silicon analysed by spatially resolves lifetime measurements (2003)

Emanuel, G., Wolke, W., Preu, R.

Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells (2002)

Biro, D., Preu, R., Schultz, O., Peters, S., Huljic, D.M., Zickermann, D., ...

A novel diffusion system for in-line rapid thermal diffusion is presented. The lamp-heated furnace has a low thermal mass and a metal free transport system based on the walking beam principle. The...

Laserunterstütztes Verfahren zur Kontaktierung der Rückseite von Silicium-Solarzellen (2002)

Grohe, A., Schneiderlöchner, E., Emanuel, G., Preu, R.

Laser-fired rear contacts for crystalline silicon solar cells (2002)

Schneiderlöchner, E., Preu, R., Lüdemann, R., Glunz, S.W.

From today's viewpoint future solar cells will be thinner, of higher efficiency and produced in greater numbers. A solar cell concept able to fit these developments could be the passivated emitter...

Laser fired contacts - a fast contact process for passivated rear silicon solar cells (2002)

Schneiderlöchner, E., Grohe, A., Preu, R., Glunz, S.W., Willeke, G.

Laser fired contacts (LFC) - transfer of a simple efficiency process scheme to industrial production (2002)

Preu, R., Schneiderlöchner, E., Grohe, A., Glunz, S., Willeke, G.

High-efficiency silicon solar cells for low-illumination applications (2002)

Glunz, S.W., Dicker, J., Esterle, M., Hermle, M., Isenberg, J., Kamerewerd, F., ...

Rapid Thermal Surface Passivation of Silicon Solar Cells (2002)

Peters, S., Ballif, C., Borchert, D., Huljic, D. M., Lee, J.Y., Preu, R., ...

Progress in screen printed front side metallization schemes for CSiTF solar cells (2002)

Rentsch, J., Huljic, D. M., Reber, S., Preu, R., Lüdemann, R.

Pad Printed Front Contacts for c-Si Solar Cells - A Technological and Economical Evaluation (2002)

Huljic, D. M., Thormann, S., Preu, R., Lüdemann, R., Willeke, G.

Transfer pad printing is a promising technique that allows to overcome restrictions of conventional screen printing regarding front side metallisation of c-Si solar cells. Within this work a pad...

Innovative Produktionstechnologien für kristalline Silicium-Solarzellen (2001)

Preu, R.

Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells (2001)

Biro, D., Preu, R., Schulz, O., Peters, S., Huljic, D. M., Zickermann, D., ...

Plasma etched PERC and buried base contact solar cells (2000)

Schaefer, S., Preu, R., Lüdemann, R., Glunz, S.W.

Laser ablation - A new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology (2000)

Preu, R., Glunz, S.W., Steinbühl, S., Pfleging, W., Wettling, W.

Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production (2000)

Krempel-Hesse, J., Preu, R., Lautenschlager, H., Lüdemann, R.

New simplified methods for patterning the rear contact of RP-PERC high-efficiency solar cells (2000)

Glunz, S.W., Preu, R., Schaefer, S., Schneiderlöchner, E., Pfleging, W., Lüdemann, R., ...

Rapid Thermal Firing of Screen Printed Contacts for Large Area Crystalline Silicon Solar Cells (2000)

Huljic, D.M., Biro, D., Preu, R., Craff-Castillo, C., Lüdemann, R.

Rapid Thermal Firing (RTF), i.e. firing of screen printed contacts using Rapid Thermal Processing (RTP), is a promising alternative compared to infrared heated conveyor belt furnaces concerning a...

Vorrichtung zum kontaminationsfreien, kontinuierlichen oder getakteten Transport von scheibenfoermigen Gegenstaenden, insbesondere Substraten oder Wafern, durch eine geschlossene Behandlungsstrecke (2000)

Schmutz, W., Gentischer, J., Preu, R., Moeller, R., Guethenke, G., Schweitzer, G.

Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production? (2000)

Preu, R., Krempel-Hesse, J., Biro, D., Huljic, D.M., Mäckel, H., Lüdemann, R.

The novel sputter source TwinMag is used to deposit silicon nitride as an antire flection layer for crystalline silicon solar cells. TwinMag consists of two pl anar magnetrons, standing side by side...

Innovative production technologies for solar cells: SOLPRO (2000)

Eversheim, W., Güthenke, G., Lüdemann, R., Preu, R., Schweitzer, G., Wettling, W.

Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen (2000)

Preu, R., Glunz, S.

WO 200060674 A UPAB: 20010116 NOVELTY - The electrical contacting method has laser light directed onto an optical microlens array (12), spaced from the material surface (2) coated with the dielectric...

Laser micromachining for applications in thin film technology (2000)

Pfleging, W., Ludwig, A., Seemann, K., Preu, R., Mäckel, H., Glunz, S.W.

Laser micromachining for applications in thin film technology. (2000)

Pfleging, W., Ludwig, A., Seemann, K., Preu, R., Mäckel, H., Glunz, S.W.

Spring Meeting of the European Materials Research Society, Strasbourg, F, June 1-4, 1999

Laser ablation. A new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology. (2000)

Preu, R., Glunz, S.W., Schäfer, S., Lüdemann, R., Wettling, W., Pfleging, W.

16th European Photovoltaic Solar Energy Conf., Glasgow, GB, May 1-5, 2000

Pad printing - a novel thick-film technique of fine-line printing for solar cells (1998)

Hahne, P., Reis, I. E., Hirth, E., Huljic, D.M., Preu, R.

The purpose of this work was to study the suitability of pad printing (tampon printing) -an innovative gravure offset (indirect) printing technique. Pad printing offers the possibility of a simple,...

Screen printed and RT-processed emitters for crystalline silicon solar cells (1998)

Preu, R., Schumacher, J.O., Hahne, P., Reis, I. E., Glunz, S.W., Warta, W.

Einfache Beschreibung des temperatur- und einstrahlungsabhängigen Verhaltens von Solarzellen (1995)

Kleiss, G., Lipps, F., Preu, R., Reiche, F., Bücher, K.

Effects of advantageous placing of pv cells and modules in generating units (1994)

Reiche, K., Preu, R., Kleiss, G., Bücher, K.