Fehlerhaft ausgeformte Teile, Reißer und Faltenbildung senken die Wirtschaftlichkeit von Umformprozessen. Ursache dafür sind vor allem Schwankungen der Prozessparameter, beispielsweise der...
Biehl, S., Staufenbiel, S., Hauschild, F.
The investigation of a novel sensor system, integrated in the main load region of forming machines, is the challenge. Therefore it is important that the thin film system is multifunctional. It has an...
Aim of the cooperation project RUM" is to increase the process reliability of hydroforming and deep drawing. For the first time an online process monitoring should be realized with the help of tool...
Intelligente Unterlegscheiben messen die Spannkraft in Schraubverbindungen (2008)
Spannkräfte in Schraubverbindungen können exakt mit der am Fraunhofer IST entwickelten Dünnschichtsensorik bestimmt werden. Die Unterlegenscheibe wird mit einer nur wenige Mikrometer dicken...
Bandorf, R., Lüthje, H., Biehl, S., Diehl, W.
The first techniques for rapid prototyping became available in the late 1980s and were used to produce models and prototype parts. Today,they are used for a much wider range of applications and are...
Biehl, S., Goericke, F., Wolf, L., Staufenbiel, S., Delan, A., Schultheiß, E.
In this work, we report on the suitability of three different sputtered titanium dioxide layers for oxygen detection at low temperatures. It was found that TiO2 -layers deposited by mid-frequency...
Piezo resistive thin-film sensor as safety system in high speed cutting processes (2008)
Biehl, S., Woitschach, O., Staufenbiel, S., Schuller, B., Wittmer, R.
This paper presents the modification of chipping tools in woodworking applications by a sensor layer. A piezo resistive hydrogenated carbon film is deposited onto the flange contact surface of a...
Piezo resistive thin film sensor system (2008)
Biehl, S., Woitschach, O., Staufenbiel, S., Brill, C.
This paper presents the latest investigations of thin film sensor developments based on amorphous hydrogenated carbon films. The piezo resistive layer is deposited in a plasma enhanced chemical...
Smart coatings for intelligent surfaces (2008)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Vorrichtung und Verfahren zur Kontrolle der kraftschluessigen Verbindung zweier Koerper (2007)
Luethje, H., Biehl, S., Bandorf, R., Sick, J.
DE 102005048384 B3 UPAB: 20070206 NOVELTY - The device has two laminar construction units arranged flat one on top of the other (1, 2). One of the surfaces of the construction units has a pressure...
Piezoresistive effect in amorphous carbon thin films (2007)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Luthje, H.
In this contribution amorphous carbon (a-C) films are integrated as strain gauges in micromachined silicon boss membranes. Sputter deposited a-C films have high hardness and < 2 % hydrogen content in...
The piezoresistive effect in diamond-like carbon films (2007)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.
Diamond-like carbon (DLC) film was deposited using plasma-assisted chemical vapour deposition (PACVD) at -350 V and -800 V. DLC strain gauges were integrated in bulk micromachined silicon. Optical...
Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films (2007)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.
We report a large piezoresistive effect of the plasma assisted chemical vapor deposited hydrogenated amorphous carbon (a-C:H) films deposited at bias voltages of -350 and -800V. The gauge factors...
Dynamic characterisation of piezo resistive sensor systems for adaptronic devices (2007)
The main part of the sensor system is an amorphous hydrogenated carbon layer, deposited in a plasma enhanced chemical vapour deposition process (PECVD). Under pressure the thin film layer changes its...
Tool coatings - new developments for forming, cutting and abrasive machining (2007)
Gäbler, J., Bewilogua, K., Biehl, S., Brand, J., Höfer, M., Keunecke, M., ...
New tool coating developments for forming, cutting and abrasive machining are presented. This comprises new chromiumnitride-(CrN)-diamond-like-carbon-(DLC) systems for punching tools,...
Smart coatings - materials, deposition, and applications (2007)
Bandorf, R., Lüthje, H., Biehl, S., Ortner, K., Jung, T.
Besides improvement of specific functions like friction, wear, or insulation technical surfaces can be equipped by sensing functions realized by so called smart coatings. Smart coatings are here...
Dynamic characterisation of piezo resistive sensor systems for adaptronic devices (2007)
This paper deals with the static and dynamic characterisation of novel piezo resisitive diamond like carbon layers which can be fabricated with high hardness and wear resistance. The advantage of...
Mechanical and piezoresistive properties of diamond-like carbon for MEMS (2007)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
Diamond-like carbon (DLC) was investigated as structural and functional material for MEMS applications. Integrated into standard bulk silicon micromachining, the processing of DLC benefited from a...
Piezoresistive gauge factor of hydrogenated amorphous carbon films (2006)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.
In this paper we report on the transport properties of hydrogenated amorphous carbon (a-C:H) which is an attractive material for strain gauges and can also be used in flow meters, accelerometers and...
Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films (2006)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.
In this paper we report on the electrical and optical properties of amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) films. Resistivity of both types of films decreases with increase...
Biehl, S., Lüthje, H., Bandorf, R.
Amorphous diamond-like carbon films are well known for their excellent tribological properties. In this paper, we will discuss the sensoric properties of multifunctional a-C:H films with respect to...
Piezoresistive diamond-like carbon micro strain gauges (2006)
Peiner, E., Tibrewala, A., Lüthje, H., Bandorf, R., Biehl, S., Doering, L.
Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon bossmembrane force sensors. DLC strain gauges...
DiaForce Dünnschichtsensoren zur Kraftmessung in extrem steifen adaptronischen Anwendungen (2006)
Lüthje, H., Biehl, S., Bandorf, R., Melz, T., Mayer, D.
This paper deals with novel thin film sensors for measurement of load and temperature in adaptronic applications. The sensor consists of a thin layer of diamond-like-carbon and can be fabricated with...
Micro force sensor with piezoresistive amorphous carbon strain gauge (2006)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
In this contribution we report for the first time on the successful integration of amorphous carbon (a-C) as a piezoresistive strain gauge into a silicon micro cantilever force sensor....
MEMS-Kraftsensoren mit integrierten Dehnungsmesstreifen aus diamantartigem Kohlenstoff (2006)
Peiner, E., Tibrewala, A., Lüthje, H., Bandorf, R., Biehl, S., Doering, L.
In diesem Beitrag beschreiben die Autoren Herstellung und Test von mikromechanischen Kraftsensoren mit integrierten Dehnungsmessstreifen aus diamantartigem Kohlenstoff (diamond-like carbon: DLC)....
Lüthje, H., Biehl, S., Bandorf, R., Peiner, E., Tibrewala, A.
This paper deals with the preparation and investigation of nano structured diamond-like-carbon films with respect to the piezo resistive, electrical and mechanical properties. Therefore a-C, a-C:H...
Lüthje, H., Biehl, S., Bandorf, R.
This contribution deals with novel surface integrated thin film sensors which were developed for use at various mechanical components and tools. In general the sensors consist of hard coatings with...
Integration von Dünnschichtsensorik in Maschinenkomponenten (2006)
Lüthje, H., Biehl, S., Bandorf, R.
Innovative Beschichtungen für Maschinenkomponenten die sowohl die tribologischen Eigenschaften eines Bauteils optimieren als auch eine Zustandskontrolle während des Betriebs ermöglichen eröffnen...
Lüthje, H., Biehl, S., Mayer, D., Melz, T., Herold, S.
DE 102006019942 A1 UPAB: 20071121 NOVELTY - The dynamometer has a piezo-resistive layer (1) that is arranged on a carrier such as steel carrier, ceramic carrier and solid-state actuator. A metal...
Intelligente Schichten für "denkende Oberflächen" (2006)
Bräuer, G., Bandorf, R., Biehl, S., Dietz, A., Lüthje, H., Vergöhl, M.
The manufacturing of intelligent surfaces according to examples in nature is an important research topic for the near future. Nowadays several coatings exist which are able to adapt their properties...
Piezoresistive co-efficient of diamond-like carbon films (2005)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H.
Transport and optical properties of a-C and a-C:H modification films (2005)
Tibrewala, A., Peiner, E., Bandorf, R., Biehl, S., Lüthje, H., Rabe, G.T.
Lüthje, H., Biehl, S., Bandorf, R., Peiner, E., Tibrewala, A.
Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an...
Micro force sensor with piezoresistive amorphous carbon strain gauge (2005)
Peiner, E., Tibrewala, A., Bandorf, R., Biehl, S., Lüthje, H., Doering, L.
In this contribution, we report for the first time on a piezoresistive amorphous carbon (a-C) strain gauge successfully integrated into a silicon micro cantilever force sensor. Amorphous carbon was...
Laser-assisted structuring for the fabrication of thin film sensors on complex 3D-surfaces (2005)
Biehl, S., Lüthje, H., Bandorf, R.
Micro-structuring of thin metal layers on three-dimensional surfaces of various machining parts and tools is an important task for innovative developments in microsystem technology. Since standard...
Waelzlager mit integrierter Zustandsmessung (2004)
Luethje, H., Biehl, S., Bandorf, R.
DE 10313060 A UPAB: 20041117 NOVELTY - A roller bearing or friction-type bearing has a sensor for determining the loading on the bearing and a tribological layer between surfaces moving on/over one...
In the field of micro- and nano-technologies microstructures on flat substrates like silicon wafers are fabricated by using photo lithography and etching techniques. For the structuring of complex...
Thin film sensor for wear detection of cutting tools (2004)
Lüthje, H., Bandorf, R., Biehl, S., Stint, B.
This contribution deals with novel smart tools for the cutting industry. Based on the combination of advanced coating techniques with an efficient sensor and MEMS technology smart tools have been...
Duennschichtmaske und Verfahren zu deren Herstellung (2004)
DE 10253126 A UPAB: 20040709 NOVELTY - Thin layer mask is produced by selectively irradiating a layer (4) applied on a substrate (1) by CVD. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also...
This paper deals with the farbrication of novel sensorintegrated ball bearings for direct measurement of the current surface temperature and the load of the individual balls and their distribution...
Verwendung einer Schicht aus diamantartigem Kohlenstoff (2004)
DE 10253178 A UPAB: 20040418 NOVELTY - Use of a layer made from diamond-like carbon as temperature sensor. USE - Used in machine components and tools. ADVANTAGE - The layer is thin, wear resistant...
VORRICHTUNG UND VERFAHREN ZUR UEBERWACHUNG UND STEUERUNG EINES FAHRZEUGS (2004)
Luethje, H., Bandorf, R., Biehl, S.
WO2004048912 A UPAB: 20040702 NOVELTY - System to control and/or monitor and/or regulate a vehicle or aircraft has a sensor to receive an operating condition value, and a signal processing unit. The...
Waelzlager mit intergrierter Zustandsmessung (2004)
DE 10243095 A UPAB: 20040514 NOVELTY - The device has a first bearing shell (1,2) with roller bearing bodies (4) in rolling contact with the bearing shell and a sensing arrangement integrated into...
Biehl, S., Lüthje, H., Bandorf, R.
Future innovations in important technical areas will depend on smart surfaces which combine protection against wear and corrosion with interactive control of the related system. Therefore...
Vorrichtung zur Kontrolle kraftschluessiger Verbindungen (2003)
Luethje, H., Biehl, S., Bandorf, R., Sick, J.
WO2003087751 A UPAB: 20031117 NOVELTY - The device (1) has force application elements (2a,2b) and at least one measurement element (3) that is provided in at least on some regions with a coating (4)...
Thin film sensor for wear detection of cutting tools (2002)
Lüthje, H., Bandorf, R., Biehl, S., Stindt, B.
This contribution deals with novel smart tools for the cutting industry. Based on the combintion of advanced coating techniques with an efficient sensor- and MEMS technology smart tools have been...
Novel force sensor based on hard diamond-like carbon films (2002)
Biehl, S., Lüthje, H., Bandorf, R.
This paper deals with the development of novel multifunctional carbon based sensor layers for use as force and pressure sensors in various mechanical applications. The diamond-like coatings (DLC)...
Bulk micromachined and wafer bonded resonators for vacuum pressure measurement (2001)
Hiller, K., Kurth, S., Zichner, N., Gessner, T., Dötzel, W., Iwert, T., ...