Materials to Microsystems:Heterogeneous Integration Technologies (2003)
Brown, April S., Jokerst, Nan Marie, Brooke, Martin A., Kuech, Thomas, Kuan, T.S.
Microsystems technology is increasingly comprised of multi-function devices and materials. Heterogeneous integration technologies are being developed to enable the flexible integration of...
SiGe relaxation on silicon-on-insulator substrates: an experimental and modeling study (2003)
Rehder, E.M., Inoki, C.K., Kuan, T.S., Kuech, Thomas F.
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