Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication (2008)
Niebelschütz, F., Pezoldt, J., Stauden, T., Cimalla, V., Tonisch, K., Brueckner, K., ...
Integration of In2O3 nanoparticle based ozone sensors with GaInN/GaN light emitting diodes (2007)
Cimalla, V., Kups, T., Stauden, T., Ambacher, O., ...
There is a high demand for compact low-cost ozone sensors. It has been shown recently that In2O3 nanolayers can act as ozone sensitive films activated at room temperature by ultraviolet light. In the...