Materials to Microsystems:Heterogeneous Integration Technologies (2003)
Brown, April S., Jokerst, Nan Marie, Brooke, Martin A., Kuech, Thomas, Kuan, T.S.
Microsystems technology is increasingly comprised of multi-function devices and materials. Heterogeneous integration technologies are being developed to enable the flexible integration of...
Fuoss, Paul, Tsao, Jeffrey, Kisker, David W., Zangwill, Ndrew, Kuech, Thomas
Partial contents: From Adatom Migration to Chemical Kinetics: Models for MBE, MOMBE and MOCVD; The Dynamical Transition to Step-Flow Growth During Homoepitaxy of GaAs (001); Evolution of Roughness on...