Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy (2009)
Weinreich, W.,
Wilde, L.,
Kücher, P.,
Lemberger, M.,
Yanev, V.,
Rommel, M.,
...
Tunneling atomic force microscopy \'01TUNA\'02 is used to identify leakage current characteristics in SiO2 doped ZrO2 thin films within the nanometer scale. TUNA current maps and local TUNA I-V...
Experimental observation of FIB induced lateral damage on silicon samples (2009)
Spoldi, G.,
Beuer, S.,
Rommel, M.,
Yanev, V.,
Bauer, A.J.,
Ryssel, H.
Scanning spreading resistance microscopy (SSRM) and scanning capacitance microscopy (SCM) were used to analyze focused ion beam (FIB) induced lateral damage around milled structures on silicon. For...
Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale (2009)
Yanev, V.,
Erlbacher, T.,
Rommel, M.,
Bauer, A.J.,
Frey, L.
High-k dielectrics exhibit strong variations in their electrical characteristics on the nanometer scale due to morphology alteration. Therefore, electrical measurement techniques with nanometer...
SSRM characterisation of FIB induced damage in silicon (2008)
Beuer, S.,
Yanev, V.,
Rommel, M.,
Bauer, A.J.,
Ryssel, H.
Scanning spreading resistance microscopy (SSRM) has been applied to study focused ion beam (FIB) induced damage in silicon in dependence on ion irradiation doses from 10(exp 12) cm-2 to 2·10(exp 16)...
Effects of X-ray radiation on the surface chemical composition of plasma deposited thin fluorocarbon films (2008)
Himmerlich, M.,
Yanev, V.,
Opitz, A.,
Keppler, A.,
Schäfer, J.A.,
Krischok, S.
Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics (2008)
Yanev, V.,
Rommel, M.,
Lemberger, M.,
Petersen, S.,
Amon, B.,
Erlbacher, T.,
...
Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy (2008)
Paskaleva, A.,
Yanev, V.,
Rommel, M.,
Lemberger, M.,
Bauer, A.J.
In this work, tunneling atomic force microscopy (TUNA) is used to describe the charge trapping in high-k ZrO2 dielectric stacks at nanoscale dimensions by analyzing the alteration of the I-V curves...
Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics (2008)
Yanev, V.,
Rommel, M.,
Lemberger, M.,
Petersen, S.,
Amon, B.,
Erlbacher, T.,
...
High-k dielectric layers (HfSixOy and ZrO2) with different film morphologies were investigated by tunneling atomic-force microscopy (TUNA). Different current distributions were observed for amorphous...
Electrical AFM techniques for the advanced characterization of materials in semiconductor technology: Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008 (2008)
Yanev, V.,
Rommel, M.,
Spoldi, G.,
Beuer, S.,
Amon, B.,
Petersen, S.,
...
Experimental observation of FIB induced lateral damage on silicon samples: Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens (2008)
Spoldi, G.,
Beuer, S.,
Rommel, M.,
Yanev, V.,
Bauer, A.J.,
Ryssel, H.
Experimental observation of FIB induced lateral damage on silicon samples: Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens (2008)
Spoldi, G.,
Beuer, S.,
Rommel, M.,
Yanev, V.,
Bauer, A.J.,
Ryssel, H.
Electrical AFM techniques for the advanced characterization of materials in semiconductor technology: Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008 (2008)
Yanev, V.,
Rommel, M.,
Spoldi, G.,
Beuer, S.,
Amon, B.,
Petersen, S.,
...
Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, Stockholm, Sweden (2007)
Beuer, S.,
Yanev, V.,
Rommel, M.,
Bauer, A.J.,
Ryssel, H.
Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy: Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, Stockholm, Sweden (2007)
Beuer, S.,
Yanev, V.,
Rommel, M.,
Bauer, A.J.,
Ryssel, H.
Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique: Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw (2007)
Yanev, V.,
Paskaleva, A.,
Weinreich, W.,
Lemberger, M.,
Petersen, S.,
Rommel, M.,
...
Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique: Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw (2007)
Yanev, V.,
Paskaleva, A.,
Weinreich, W.,
Lemberger, M.,
Petersen, S.,
Rommel, M.,
...
A novel class of sensors for micro- and nanofluidic systems in biotechnological applications. (2005)
Schober, A.,
Kittler, G.,
Lübbers, B.,
Buchheim, C.,
Majdeddin, A.,
Cimalla, V.,
...
7.Dresdner Sensor Symp., Dresden, 12.-15.Dezember 2005
A novel class of sensors for system integrative concepts in biotechnological applications. (2004)
Schober, A.,
Kittler, G.,
Buchheim, C.,
Majdeddin, A.,
Cimalla, V.,
Fischer, M.,
...
Beckmann, D. [Hrsg.]